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==PhotoLuminescence Mapper: YWafer Mapper RD8-CP Photoluminescence [[Image:section under construction.jpg|70px]]==
==PhotoLuminescence Mapper: YWafer Mapper RD8-CP Photoluminescence==


The PL mapper is used for non-destructive, spatially resolved optical characterization of wafers and thin-film samples. It is primarily used for photoluminescence mapping, but can also perform reflectance measurements using the integrated halogen lamp.
The PL mapper is used for non-destructive, spatially resolved optical characterization of wafers and thin-film samples. It is primarily used for photoluminescence mapping, but can also perform reflectance measurements using the integrated halogen lamp.
The PL mapper is a YWafer Mapper RD8-CP photoluminescence mapping system from YSystems, Japan. It contains an enclosed motorized mapping stage, laser excitation sources at 405, 532 and 980 nm, 310-2160 nm detection range, a halogen lamp for reflectance measurements, an integrated control PC, and safety interlocks. The system is operated using the YWaferController software.


The PL mapper is a YWafer Mapper RD8-CP photoluminescence mapping system from YSystems, Japan. It contains an enclosed motorized mapping stage, laser excitation sources at 405, 532 and 980 nm, 310-2160 nm detection range, a halogen lamp for reflectance measurements, an integrated control PC, and safety interlocks. The system is operated using the YWaferController software. For PL measurements, the system can map peak wavelength, peak amplitude, integrated intensity and FWHM. The software can also display PL data on a wavelength or energy scale. For reflectance measurements, the system can map reflectance-related parameters across the selected sample area.


.ywf map/spectra files can be viewed locally using the publicly available YWaferViewer software [https://www.ysystems.jp/en/component/edocman/public-downloads Here]


System: YWafer Mapper RD8-CP Photoluminescence Mapping System.
*System: YWafer Mapper RD8-CP Photoluminescence Mapping System.
Manufacturer: YSystems, Japan.
*Manufacturer: YSystems, Japan.
Full configuration: YWAFER-RD8-CP-VISNIR-QE-NIR22-405-532-980-FT-R-HAL.
*Full configuration: YWAFER-RD8-CP-VISNIR-QE-NIR22-405-532-980-FT-R-HAL.
Software: YWaferController for measurements, YWaferViewer for viewing maps and spectra and extracting data.
*Software: YWaferController for measurements, YWaferViewer for viewing maps and spectra and extracting data.


PL excitation sources: 405 nm, 532 nm and 980 nm lasers.
Laser power: 100 mW (405 nm), 80 mW (532 nm) and 150 mW (980 nm).
Reflectance source: Integrated halogen lamp.
Measurement types: Photoluminescence mapping and reflectance mapping.
Detectors: Silicon detector and IR/InGaAs detector. The system can switch between them to allow detection in the entire range.
Silicon detector range: 310-1080 nm.
IR/InGaAs detector range: 950-2160 nm.


Sample/tray sizes: 2-inch, 4-inch, 2-inch quarter, 4-inch quarter, 40x40 mm, 76x26 mm (glass microscopy slide) and odd-sized samples smaller than 4-inch.
The user manual and contact information can be found in [http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=574 '''LabManager'''].
Minimum mapping resolution: 0.02 x 0.02 mm.
Spot size: Approx. 100 µm at ~1000 nm.
Reference: Permanent internal reference sample, referred to as “1080 nm ref”. The same reference sample can be found in the black suitcase on the side of the PL mapper.
 
The user manual and contact information can be found in [http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=152 '''LabManager'''].


{| border="2" cellspacing="0" cellpadding="10"  
{| border="2" cellspacing="0" cellpadding="10"  
|-
|-
!style="background:silver; color:black" align="left" rowspan="6" valign="top" |Performance
!style="background:silver; color:black" align="left" rowspan="4" valign="top" |Performance
|style="background:LightGrey; color:black"|Excitation
|style="background:LightGrey; color:black"|Excitation
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*~100 mW @ 405 nm (~70mW on sample)
*100 mW @ 405 nm
*~10 mW @ 532 nm
*80 mW @ 532 nm
*~10 mW @ 980 nm
*150 mW @ 980 nm
*white light source for thickness and reflectance measurements
*white light source for reflectance measurements (halogen lamp)
|-
|-
|style="background:LightGrey; color:black"|Detection
|style="background:LightGrey; color:black"|Detection
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* integrated signal: Si and/or InGaAs detector
*Silicon detector and IR/InGaAs detector. The system can switch between them to allow detection in the entire range.
* Spectral scan: Si CCD (up to 1100 nm), InGaAs photodiode array (900-1700 nm)
*Silicon detector range: 310-1080 nm.
|-
*IR/InGaAs detector range: 950-2160 nm.
|style="background:LightGrey; color:black"|Gratings
|style="background:WhiteSmoke; color:black"|
*600 lines/mm (single frame: 60 nm @ 400 nm)
*300 lines/mm (single frame: 120 nm @ 900 nm)
*150 lines/mm (single frame: 270 nm @ 1550 nm)
|-
|-
|style="background:LightGrey; color:black"|Chuck sizes
|style="background:LightGrey; color:black"|Sample/tray sizes
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*2", 3" and 4"
*2-inch, 4-inch, 2-inch quarter, 4-inch quarter,
*40x40 mm, 76x26 mm (glass microscopy slide)
*odd-sized samples smaller than 4-inch
|-
|-
|style="background:LightGrey; color:black"|Resolution
|style="background:LightGrey; color:black"|Resolution
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
* Minimum spatial resolution 100 µm
*Minimum mapping resolution: 0.02 x 0.02 mm.
* spotsize ~100 µm
*Spot size: Approx. 100 µm at ~1000 nm.
|-
|style="background:LightGrey; color:black"|Wavelength accuracy
|style="background:WhiteSmoke; color:black"|
* < +/- 1 nm
|-
|-
!style="background:silver; color:black" align="left" rowspan="2" valign="top" |Materials
!style="background:silver; color:black" align="left" rowspan="2" valign="top" |Materials
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|-
|-
!style="background:silver; color:black" align="left" rowspan="6" valign="top" |Software
!style="background:silver; color:black" align="left" rowspan="6" valign="top" |Software
|style="background:LightGrey; color:black"|RPM viewer
|style="background:LightGrey; color:black"|YWaferViewer
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Only on the local PC at the system
*.ywf map/spectra files can be viewed locally using the publicly available YWaferViewer software [https://www.ysystems.jp/en/component/edocman/public-downloads Here]
|}
|}


 
==PhotoLuminescence Mapper RPM2000 (This tool is not being serviced by DTU Nanolab anymore)==
 
For PL measurements, the system can map peak wavelength, peak amplitude, integrated intensity and FWHM. The software can also display PL data on a wavelength or energy scale. For reflectance measurements, the system can map reflectance-related parameters across the selected sample area.
==PhotoLuminescence Mapper RPM2000 ==


[[Image:PL-mapper.jpg|500px|right|thumb|Positioned in the MOCVD room: F-1, {{photo1}}]]
[[Image:PL-mapper.jpg|500px|right|thumb|Positioned in the MOCVD room: F-1, {{photo1}}]]
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