Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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The alignment marks must be placed within the BSA windows. The Overview camera only shows the top side of the substrate, and cannot be used to locate the BSA marks. | The alignment marks must be placed within the BSA windows. The Overview camera only shows the top side of the substrate, and cannot be used to locate the BSA marks, so it's a good idea to include arrows and/or circles around the alignment marks. Remember that a layer exposed on the backside of a substrate must be mirrored across the y-axis in order to match up with the structures on the frontside. A .gds design can be mirrored during conversion using the STEP function, but a .cif design must be mirrored in the design software. | ||
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