|
|
| Line 83: |
Line 83: |
| ==Alignment mark design and locations== | | ==Alignment mark design and locations== |
| [[Specific_Process_Knowledge/Pattern_Design#Alignment_marks|Alignment mark design and locations]]. | | [[Specific_Process_Knowledge/Pattern_Design#Alignment_marks|Alignment mark design and locations]]. |
|
| |
| <!--
| |
| ==Quality Control (QC)==
| |
| {| border="1" cellspacing="2" cellpadding="2" colspan="3"
| |
| |bgcolor="#98FB98" |'''Quality Control (QC) for KS Aligner'''
| |
| |-
| |
| |
| |
| *[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=44 The QC procedure for Aligner: MA6-1] - '''requires login'''<br>
| |
| *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=44 The newest QC data for Aligner: MA6-1] - '''requires login'''
| |
| {| {{table}}
| |
| | align="center" |
| |
| {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:300px"
| |
|
| |
| ! QC Recipe:
| |
| ! Manual intensity measurement
| |
| |-
| |
| |Measurement area
| |
| |100 mm
| |
| |-
| |
| |Number of measurements
| |
| |5
| |
| |-
| |
| |}
| |
| | align="center" valign="top"|
| |
| {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px"
| |
| !QC limits
| |
| !Aligner: MA6-1
| |
| |-
| |
| |Nominal intensity
| |
| |8 mW/cm<sup>2</sup> @ 365 nm
| |
| |-
| |
| |Intensity deviation from nominal
| |
| |≤5%
| |
| |-
| |
| |Intensity non-uniformity
| |
| |≤2%
| |
| |-
| |
| |}
| |
| |-
| |
| |}
| |
| Power supply and/or lamp will be adjusted if intensity is outside the limit.
| |
| |}
| |
| -->
| |
