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Specific Process Knowledge/Lithography/EBeamLithography/Nanobook: Difference between revisions

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The entire book is available for download as a 2.4 gigapixel composite SEM image viewable in PureRef.
The entire book is available for download as a [https://drive.google.com/file/d/10Qa4RgFeogYEqRzbjccWhI5WEIbZZIhM/view?usp=share_link 2.4 gigapixel composite SEM image] viewable in PureRef.


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SEM image of a small fraction of the book. Letter line width is 31 nm and letter height is about 116 nm.
Composite SEM image of the entire book.
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