Specific Process Knowledge/Characterization/Optical microscope: Difference between revisions
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|-style="background:white; color:black; vertical-align:middle; text-align:center;" | |-style="background:white; color:black; vertical-align:middle; text-align:center;" | ||
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!Nikon SMZ 1000 | !Nikon<br>SMZ 1000 | ||
!Noco IR | !Noco IR | ||
!Leica INM 100 | !Leica<br>INM 100 | ||
!Zeiss Jenatech | !Zeiss<br>Jenatech | ||
!Nikon Eclipse L200 #1 | !Nikon Eclipse<br>L200 #1 | ||
!Nikon Eclipse L200 #2 | !Nikon Eclipse<br>L200 #2 | ||
!Nikon Eclipse L200N #3 | !Nikon Eclipse<br>L200N #3 | ||
!Nikon Eclipse L200N #4 | !Nikon Eclipse<br>L200N #4 | ||
!Nikon ME 600 | !Nikon<br>ME 600 | ||
!Leica S8 APO | !Leica<br>S8 APO | ||
!Zeiss Axiotron | !Zeiss<br>Axiotron | ||
!Olympus MX63 | !Olympus<br>MX63 | ||
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|cleanroom<br>D-3 | |cleanroom<br>D-3 | ||
|cleanroom<br>E-5 | |cleanroom<br>E-5 | ||
|cleanroom<br>F-1 | |cleanroom<br>F-1 | ||
|cleanroom<br>Cx1 | |cleanroom<br>Cx1 | ||
|cleanroom<br>F-3 | |cleanroom<br>F-3 | ||
|cleanroom<br>E-4 | |||
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|- | |- | ||
|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | ||
!Responsible group | !Responsible<br>group | ||
|Wet chemistry | |Wet chemistry | ||
|Wet chemistry | |Wet chemistry | ||
|Wet chemistry | |Wet chemistry | ||
|Lithography | |||
|Lithography | |Lithography | ||
|Lithography | |Lithography | ||
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*20x | *20x | ||
*50x | *50x | ||
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*1.25x | |||
*5xBD | |||
*10xBD | |||
*20xBD | |||
*50xBD | |||
*100xBD | |||
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|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | ||
!Ocular | !Ocular | ||
|10x | |||
|10x | |10x | ||
|10x | |10x | ||
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|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | |-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | ||
!Special features | !Special<br>features | ||
|Stereoscopic | |Stereoscopic | ||
|IR imaging | |IR imaging | ||
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|Stereoscopic | |Stereoscopic | ||
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|- | |- | ||
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|-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | |-style="background:WhiteSmoke; color:black; vertical-align:middle; text-align:left;" | ||
!Contrast mechanisms | !Contrast<br>mechanisms | ||
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*Brightfield | *Brightfield | ||
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*Brightfield | *Brightfield | ||
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*Brightfield | |||
*Darkfield | |||
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*Polarizer | |||
*Brightfield | *Brightfield | ||
*Darkfield | *Darkfield | ||
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|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | |-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | ||
!Illumination modes | !Illumination<br>modes | ||
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*Episcopic | *Episcopic | ||
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*Episcopic | *Episcopic | ||
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*Episcopic | |||
*Diascopic | |||
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*Episcopic | *Episcopic | ||
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*DS-Fi2 | *DS-Fi2 | ||
*C-mount, 0.7x relay | *C-mount,<br>0.7x relay | ||
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*DS-Fi2 | *DS-Fi2 | ||
*C-mount, 0.7x relay | *C-mount,<br>0.7x relay | ||
|DS-Fi2 | |DS-Fi2 | ||
|None | |None | ||
|Infinity X | |Infinity X | ||
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*DP23-CU | |||
*C-mount | |||
|- | |- | ||
|- | |- | ||
|-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | |-style="background:LightGrey; color:black; vertical-align:middle; text-align:left;" | ||
!Analysis software | !Analysis<br>software | ||
|None | |None | ||
|None | |None | ||