Specific Process Knowledge/Back-end processing/Disco Saw: Difference between revisions
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[[File:IMG_20230228_112922.jpg|thumb||Dicers positioned on 1. floor bldg 346 room 157]] | [[File:IMG_20230228_112922.jpg|thumb||Dicers positioned on 1. floor bldg 346 room 157]] | ||
In general it is ''not allowed'' to bring back your samples into the Cleanroom. You need approval from DTU Nanolab staff to do this, follow the instructions [[Specific Process Knowledge/Wafer cleaning/ | In general it is ''not allowed'' to bring back your samples into the Cleanroom. You need approval from DTU Nanolab staff to do this, follow the instructions [[Specific Process Knowledge/Wafer cleaning/Bring_samples_into_Cleanroom_or_PolyFabLab|here]] to apply for approval. Your samples have to be thoroughly cleaned before entry, at a minimum a triton ultrasonic clean followed by a piranha clean. You will only be allowed to use a limited number of tools for the processing after dicing. | ||
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=== Recommended dicing parameters === | === Recommended dicing parameters === | ||
DTU Nanolab offers 2 different blades for different | WIP | ||
DTU Nanolab offers 2 different blades for different bulk materials. See recommended parameters below. If your sample consists of a thinfilm (less than 5µm) on a bulk carrier, then use parameters for the bulk material. | |||
For other materials/blades consult tool responsible. | For other materials/blades consult tool responsible. | ||
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|Bonded Si/Pyrex||DAD321 ||B1A862 ||0.5 mm/s ||15'000 ||0.5mm | |Bonded Si/Pyrex||DAD321 ||B1A862 ||0.5 mm/s ||15'000 ||0.5mm | ||
|- | |||
|LiNbO3**||DAD321 ||B1A862 ||1-3 mm/s ||15'000 ||0.5mm | |||
|- | |||
|SiC***||DAD3241 ||ZP07 ||1 mm/s ||15'000 ||0.5mm | |||
|} | |} | ||
(*) Multiple cuts at the same location can be done if deeper cuts are needed | (*) Multiple cuts at the same location can be done if deeper cuts are needed <br> | ||
(**) Tested once 26-05-08, no systematic test done <br> | |||
(***) Tested once 25-10-29, no systematic test done | |||
=== Available blades === | === Available blades === | ||