Specific Process Knowledge/Lithography/Development/manualTMAH developer: Difference between revisions
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'''Tool description'''<br> | '''Tool description'''<br> | ||
The Developer: TMAH manual 02 is a semi-automatic and programmable single substrate developer system, which can be used for development of resists on chips, 50 mm, 100 mm and 150 mm substrates. The development is done using AZ 726 MIF, which is a 2.38% TMAH solution with wetting agent. | The Developer: TMAH manual 02 is a semi-automatic and programmable single substrate developer system, which can be used for development of resists on chips, 50 mm, 100 mm and 150 mm substrates. The development is done using AZ 726 MIF, which is a 2.38% TMAH solution with wetting agent. | ||
Single substrates are loaded manually into the tool, but the developer dispense, puddle time, agitation, rinse and drying is controlled by the tool. | |||
{| class="wikitable" | {| class="wikitable" | ||
! style="text-align:left" | Product | ! style="text-align:left" | Product | ||
| style="padding-left: 10px" | Laurell EDC-650-HZB-23NP | | style="padding-left: 10px" | Laurell EDC-650-HZB-23NP | ||
|- | |- | ||
! style="text-align:left" | Year of purchase | ! style="text-align:left" | Year of purchase | ||
| style="padding-left: 10px" | 2016 | | style="padding-left: 10px" | 2016 | ||
|- | |- | ||
! style="text-align:left" | Tool modification | ! style="text-align:left" | Tool modification | ||
| style="padding-left: 10px" | | | style="padding-left: 10px" | | ||
Converted from e-beam solvent developer to UV TMAH developer in 2024<br> | |||
Added media flow controllers for developer, rinse and drying media in 2025 | |||
|- | |- | ||
! style="text-align:left" | Location | ! style="text-align:left" | Location | ||
| style="padding-left: 10px" | Cleanroom E-4 | | style="padding-left: 10px" | Cleanroom E-4 | ||
|} | |} | ||
'''User manual'''<br> | '''User manual'''<br> | ||
The user manual and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach= | The user manual and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=341 LabManager] - '''requires login''' | ||
'''Tool training'''<br> | '''Tool training'''<br> | ||
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#Dry substrate and chamber with nitrogen | #Dry substrate and chamber with nitrogen | ||
''' | |||
'''Multi puddle'''<br> | |||
Multi puddle recipes repeat steps 2-4 for the given number of puddles. | |||
==Process recipes== | ==Process recipes== | ||