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!
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! [[Specific_Process_Knowledge/Lithography/Descum#Plasma Asher 3: Descum|Plasma Asher 3: Descum]]
! [[Specific_Process_Knowledge/Lithography/Descum/plasmaAsher03|Plasma Asher 3: Descum]]
! [[Specific_Process_Knowledge/Lithography/Descum#Plasma_Asher 4|Plasma Asher 4 (Clean)]]
! [[Specific_Process_Knowledge/Lithography/Descum/plasmaAsher04|Plasma Asher 4 (Clean)]]
! [[Specific_Process_Knowledge/Lithography/Descum#Plasma Asher 5|Plasma Asher 5 (Dirty)]]
! [[Specific_Process_Knowledge/Lithography/Descum/plasmaAsher05|Plasma Asher 5 (Dirty)]]
|-
|-
! scope=row style="text-align: left;" |  Purpose  
! scope=row style="text-align: left;" |  Purpose  
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*Films, or patterned films, of any material except type IV (Pb, Te)
*Films, or patterned films, of any material except type IV (Pb, Te)
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|}
<br clear="all" />
{{:Specific Process Knowledge/Lithography/Descum/plasmaAsher03}}
{{:Specific Process Knowledge/Lithography/Descum/plasmaAsher04}}
{{:Specific Process Knowledge/Lithography/Descum/plasmaAsher05}}


=Decommisioned tools=
=Decommisioned tools=
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