Specific Process Knowledge/Lithography/Descum: Difference between revisions
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=Decommisioned tools= | =Decommisioned tools= | ||
<span style="color:red">Plasma asher 1 was decommissioned 2024-12-02.</span> | <span style="color:red">Plasma asher 1 was decommissioned 2024-12-02.</span> | ||
[[Specific Process Knowledge/Lithography/Descum/PlasmaAsher1|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Descum/PlasmaAsher1|Information about decommissioned tool can be found here.]] | ||
<span style="color:red">Plasma asher 2 was decommissioned 2024-12-02.</span> | <span style="color:red">Plasma asher 2 was decommissioned 2024-12-02.</span> | ||
[[Specific Process Knowledge/Lithography/Descum/PlasmaAsher2|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Descum/PlasmaAsher2|Information about decommissioned tool can be found here.]] | ||
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