Specific Process Knowledge/Lithography/Descum: Difference between revisions
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! [[Specific_Process_Knowledge/Lithography/Descum | ! [[Specific_Process_Knowledge/Lithography/Descum/plasmaAsher03|Plasma Asher 3: Descum]] | ||
! [[Specific_Process_Knowledge/Lithography/Descum | ! [[Specific_Process_Knowledge/Lithography/Descum/plasmaAsher04|Plasma Asher 4 (Clean)]] | ||
! [[Specific_Process_Knowledge/Lithography/Descum | ! [[Specific_Process_Knowledge/Lithography/Descum/plasmaAsher05|Plasma Asher 5 (Dirty)]] | ||
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! scope=row style="text-align: left;" | Purpose | ! scope=row style="text-align: left;" | Purpose | ||
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*Films, or patterned films, of any material except type IV (Pb, Te) | *Films, or patterned films, of any material except type IV (Pb, Te) | ||
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=Decommisioned tools= | =Decommisioned tools= | ||
<span style="color:red">Plasma asher 1 was decommissioned 2024-12-02.</span> | <span style="color:red">Plasma asher 1 was decommissioned 2024-12-02.</span> | ||
[[Specific Process Knowledge/Lithography/Descum/PlasmaAsher1|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Descum/PlasmaAsher1|Information about decommissioned tool can be found here.]] | ||
<span style="color:red">Plasma asher 2 was decommissioned 2024-12-02.</span> | <span style="color:red">Plasma asher 2 was decommissioned 2024-12-02.</span> | ||
[[Specific Process Knowledge/Lithography/Descum/PlasmaAsher2|Information about decommissioned tool can be found here.]] | [[Specific Process Knowledge/Lithography/Descum/PlasmaAsher2|Information about decommissioned tool can be found here.]] | ||
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