Specific Process Knowledge/Lithography/Resist/UVresist/exposureDoseNaOH: Difference between revisions
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=Exposure dose when using AZ 351B as developer= | =Exposure dose when using AZ 351B as developer= | ||
The exposure doses listed below are for ''generic'' good exposure results, and can be a compromise between getting good lines, as well as good dots, in both clear field and dark field exposures. The optimal dose for any given specific project, could be different from the listed values. | The exposure doses listed below are for ''generic'' good exposure results, and can be a compromise between getting good lines, as well as good dots, in both clear field and dark field exposures. The optimal dose for any given specific project, could be different from the listed values. | ||