Specific Process Knowledge/Lithography/Coaters/labspin: Difference between revisions
| Line 145: | Line 145: | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Epoxy/Acrylate | !Epoxy/Acrylate | ||
|Cyclopentanone/PGMEA | |Cyclopentanone/PGMEA/PGME/GBL | ||
|Acetone | |Acetone | ||
| | | | ||
SU-8 | SU-8 3000 series<br> | ||
SU-8 series<br> | |||
mr-DWL<br> | mr-DWL<br> | ||
LOR (1A, 3A, 5A)<br> | LOR (1A, 3A, 5A)<br> | ||