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Specific Process Knowledge/Lithography/Coaters/labspin: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,496 edits
 
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Line 145: Line 145:
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!Epoxy/Acrylate
!Epoxy/Acrylate
|Cyclopentanone/PGMEA
|Cyclopentanone/PGMEA/PGME/GBL
|Acetone
|Acetone
|
|
SU-8 2000 series<br>
SU-8 3000 series<br>
SU-8 series<br>
mr-DWL<br>
mr-DWL<br>
LOR (1A, 3A, 5A)<br>
LOR (1A, 3A, 5A)<br>
Line 203: Line 204:
Please do NOT use substances which is not for the dedicated bowlsets  
Please do NOT use substances which is not for the dedicated bowlsets  
|-
|-
|style="background:LightGrey; color:black"|All purpose
|style="background:LightGrey; color:black"|Dirty bowlset
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
Spin coating of dirty substances in '''All purpose'''
Spin coating of other substances in dirty bowlset
<br>
<br>


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