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Specific Process Knowledge/Etch/III-V RIE: Difference between revisions

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'''''Unless otherwise stated, this page is written by DTU Nanolab internal'''''
'''''Unless otherwise stated, this page is written by DTU Nanolab internal'''''


<blockquote>This tool is expected to be decommissioned soon - please ask the dryetch group for alternatives.</blockquote>
==III-V RIE Plassys <span style="background:#ff0000"> This tool has been decommissioned - please ask the dryetch group for alternatives.</span>==
 
==III-V RIE Plassys==
===(will be decommissioned October 2025)===
===(will be decommissioned October 2025)===


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