Specific Process Knowledge/Thermal Process/A2 Gate Oxide furnace: Difference between revisions
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''This page is written by DTU Nanolab internal'' | ''This page is written by DTU Nanolab internal'' | ||
[[ | [[Category:Equipment|Thermal A2]] | ||
[[ | [[Category:Thermal process|Furnace]] | ||
[[ | [[Category:Furnaces|A2]] | ||
==Gate Oxide furnace (A2)== | ==Gate Oxide furnace (A2)== | ||
[[Image:borpredep.jpg|thumb|300x300px|Gate Oxide furnace (A2). Positioned in cleanroom B-1.''Photo: DTU Nanolab internal'']] | [[Image:borpredep.jpg|thumb|300x300px|Gate Oxide furnace (A2). Positioned in cleanroom B-1.''Photo: DTU Nanolab internal'']] | ||