Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/E1 furnace break-down voltage measurement results: Difference between revisions
Created page with "==Breakdown voltage results for the E1 8" Oxidation furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''February 2022''' |DRY1050 |117 nm |350x350px|thumb|left |image:2022-02-08_10-47-35_Wafer_E1_117nm_Rel.png|350x350px|thumb|..." |
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|'''Absolute break-down voltage''' | |'''Absolute break-down voltage''' | ||
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<i>= Absolute break-down voltage/oxide thickness<i> | |||
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<i>The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.<i> | |||
Latest revision as of 12:53, 16 September 2025
Breakdown voltage results for the E1 8" Oxidation furnace
Dry oxidation
| Date | Oxidation recipe | Oxide thickness | Absolute break-down voltage | Relative break-down voltage
= Absolute break-down voltage/oxide thickness |
| February 2022 | DRY1050 | 117 nm |  |
 |
| November 2023 | DRY1100 | 510 nm |  |
 |
| April 2025 | DRY1050 | 115 nm |  |
 |
The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.