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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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(All substrates and film or pattern of all types, unless otherwise noted on the hotplate)
(All substrates and film or pattern of all types, unless otherwise noted on the hotplate)
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Silicon and glass substrates
Tool dependent. Typically Silicon, III-V, and glass substrates.
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Silicon, glass, and high Tg polymer substrates
Silicon, glass, and high Tg polymer substrates
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Silicon, glass, and high Tg polymer substrates
Silicon, glass, and high Tg polymer substrates


Film or pattern of all types except resist|
Film or pattern of all types except resist
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Hotplate dependent. Any restrictions will be noted on the hotplate.
Hotplate dependent. Any restrictions will be noted on the hotplate.
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Low Tg polymer, copper, steel substrates.
Pb, Te films.
|III-V, low Tg polymer, copper, steel substrates
|III-V, low Tg polymer, copper, steel substrates
|III-V, low Tg polymer, copper, steel substrates
|III-V, low Tg polymer, copper, steel substrates
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<br clear="all" />
<br clear="all" />


==SU-8 hotplates 1, 2 & 3==
==SU-8 hotplates==
[[Image:SU-8hotplates.jpg|300x300px|thumb|Hotplate 1 (SU8) and Hotplate 2 (SU8) situated in C-1]]
[[Image:SU-8hotplates.jpg|300x300px|thumb|Hotplate 1 (SU8) and Hotplate 2 (SU8) (the old set-up in C-1)]]
We have three dedicated SU-8 hotplates in C-1 and E-4.
We have four hotplates dedicated to baking of SU-8.
<br>Hotplate 1 (SU8) and Hotplate 2 (SU8) are located in cleanroom E-4.
<br>Hotplate 3 (SU8) and Hotplate 4 (SU8) are located in PolyFabLab in building 347.


Users can control the ramp-time, the baking temperature, and the baking time.
Users can control the ramp-time, the baking temperature, and the baking time.
In order to avoid thermal curing of SU-8 residues on the hotplates, they are temperature limited to 180°C.
<br>The hotplates are temperature limited to 180°C.




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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=453 Hotplate 3 (SU8)] - '''requires login'''
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=453 Hotplate 3 (SU8)] - '''requires login'''
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=454 Hotplate 4 (SU8)] - '''requires login'''
<br clear="all" />
<br clear="all" />


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<div align="right">
<div align="right">
<gallery widths="320px" heights="240px">
<gallery widths="320px" heights="240px">
File:Benchtop C1.jpg|Benchtop hotplate for Spray coater located in C-1
File:Benchtop C1.jpg|Benchtop hotplate for Spray coater located in Cx1
File:Labspin_2.JPG|Benchtop hotplates for Labspins in E-5
File:Labspin_2.JPG|Benchtop hotplates for Labspins in E-5
</gallery>
</gallery>
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