Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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*No mapping facility | *No mapping facility | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan=" | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Accessories | ||
|style="background:LightGrey; color:black"|Focusing optics | |style="background:LightGrey; color:black"|Focusing optics | ||
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*Base for ex-situ measurements, transmission data can be done by holding the sample up against the detector | *Base for ex-situ measurements, transmission data can be done by holding the sample up against the detector | ||
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|style="background:LightGrey; color:black"|Heating stage | |||
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*Heating stage for measurements at temperatures up to 300C | |||
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*None | |||
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*None | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates | ||
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==Filmtek 4000== | ==Filmtek 4000== | ||
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[[image:Filmtek.JPG|275x275px|right|thumb|FilmTek 4000: positioned in cleanroom | [[image:Filmtek.JPG|275x275px|right|thumb|FilmTek 4000: positioned in cleanroom D-1, {{photo1}}]] | ||
FilmTek 4000 is a computerized film thickness measurement and material characterization system. This system combines fiber-optic spectrophotometry with advanced material modeling software to provide an affordable and reliable tool for the simultaneous measurement of film thickness, index of refraction, and extinction coefficient | FilmTek 4000 is a computerized film thickness measurement and material characterization system. This system combines fiber-optic spectrophotometry with advanced material modeling software to provide an affordable and reliable tool for the simultaneous measurement of film thickness, index of refraction, and extinction coefficient | ||