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Specific Process Knowledge/Thin film deposition/Deposition of Niobium: Difference between revisions

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= Deposition of Nb =
= Deposition of Niobium =
Niobium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the deposition equipment.
Niobium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the deposition equipment.