Specific Process Knowledge/Characterization/SEM Supra 3: Difference between revisions
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|style="background:LightGrey; color:black"|Detectors | |style="background:LightGrey; color:black"|Detectors | ||
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*Secondary electron ( | *Secondary electron (SE2) | ||
*Inlens secondary electron (Inlens) | *Inlens secondary electron (Inlens) | ||
*High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB) | *High Definition four quadrant Angular Selective Backscattered electron detector (HDAsB) | ||
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|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
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*Up to 6" wafer with full view | *Up to 4" wafer with full view | ||
*Up to 6" wafer with full view, requires rotation of the wafer | |||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||