Specific Process Knowledge/Etch/Wet Polysilicon Etch: Difference between revisions
have mentioned dummy wafers for testing the etch rate |
No edit summary Tag: Manual revert |
||
| (2 intermediate revisions by 2 users not shown) | |||
| Line 7: | Line 7: | ||
'''All measurements on this page has been made by Nanolab staff.''' | '''All measurements on this page has been made by Nanolab staff.''' | ||
[[ | [[Category:Equipment|Etch Wet Polysilicon]] | ||
[[ | [[Category:Etch (Wet) bath|Polysilicon]] | ||
==Wet PolySi Etch== | ==Wet PolySi Etch== | ||