Specific Process Knowledge/Thin film deposition/Deposition of NiV: Difference between revisions
Appearance
| Line 7: | Line 7: | ||
* [[/Sputtering of NiV in Lesker|Sputtering of NiV in Sputter-System (Lesker)]] | * [[/Sputtering of NiV in Lesker|Sputtering of NiV in Sputter-System (Lesker)]] | ||
* [[/Sputtering of NiV in Sputter-System Metal-Oxide (PC1)|Sputtering of NiV in Sputter-System Metal-Oxide (PC1)]] | * [[/Sputtering of NiV in Sputter-System Metal-Oxide (PC1)|Sputtering of NiV in Sputter-System Metal-Oxide (PC1)]] | ||
* [[/Sputtering of NiV in Wordentec|Sputtering of NiV in Wordentec]] (tool now decommissioned, but results | * [[/Sputtering of NiV in Wordentec|Sputtering of NiV in Wordentec]] (tool now decommissioned, but results are of general interest) | ||