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Specific Process Knowledge/Thin film deposition/Deposition of Nickel: Difference between revisions

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*Almost any that does not degas at your intended substrate temperature. See also the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet]
*Almost any that does not degas at your intended substrate temperature. See also the [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet]
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* Almost any that do not degas.
* Almost any that do not degas. See also the [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=244 cross-contamination sheet]
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*Almost any that does not degas at your intended substrate temperature. See cross contamination sheets for [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=441 PC1] and [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=442 PC3]
*Almost any that does not degas at your intended substrate temperature. See cross contamination sheets for [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=441 PC1] and [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=442 PC3]


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Nickel deposition is tested occasionally, around 1 time per year in each machine. You are welcome to contact staff to request an extra test of the material.


Nickel deposition is tested occasionally, around 1 time per year in each machine. Let us know if you notice any problems or would like an extra test of the material. LabManager links require login.
'''LabManager links to procedures and data''' (require login):


*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the E-beam Evaporator (Temescal)]<br>
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the E-beam Evaporator (Temescal)]<br>
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*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=511 QC procedure for the E-beam Evaporator (10-pockets)]<br>
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=511 QC procedure for the E-beam Evaporator (10-pockets)]<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=511 The newest QC data for the E-beam Evaporator (10-pockets)]<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=511 The newest QC data for the E-beam Evaporator (10-pockets)]<br>


{| {{table}}
{| {{table}}
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{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:440px"
{| border="2" cellspacing="1" cellpadding="2" align="left" style="width:400px"
 
! QC Recipe:
! QC Recipe:
! Standard recipes/Ni  
! Standard recipes/Ni  
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|Deposition rate
|Deposition rate
|10 Å/s
|2 Å/s
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|Thickness
|Thickness
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|Pressure
|Pressure
|Below 1*10<sup>-6</sup> mbar
|Below 1*10<sup>-6</sup> mbar
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{| {{table}}
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| align="left" valign="top"|
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px"
{| border="2" cellspacing="1" cellpadding="2" align="left" style="width:400px"
!QC limits
!QC limits
!Both E-beam Evaporators
!Both E-beam Evaporators
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Thickness is measured in 5 points with a stylus profiler. <br>
 
Thickness is measured in 5 points with a stylus profiler (usually DektakXT). <br>
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