Specific Process Knowledge/Thin film deposition/Electroplating-Ni: Difference between revisions
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'''<p style="color:red;">The Electroplater Technotrans microform.200 has been decomissioned | '''<p style="color:red;">The Electroplater Technotrans microform.200 has been decomissioned. For electroplating, please contact DTU Mechanical Engineering.</p>''' | ||
[[Category: Equipment|Thin film Electroplating Ni]] | [[Category: Equipment|Thin film Electroplating Ni]] | ||
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Uniformity across a 4" wafer is around 5% for the standard processes (the edge being slightly thicker than the center of the sample). Running at high current densities will deposit a nickel layer that is quite soft. Decreasing current density will increase tensile strength of the deposited nickel. | Uniformity across a 4" wafer is around 5% for the standard processes (the edge being slightly thicker than the center of the sample). Running at high current densities will deposit a nickel layer that is quite soft. Decreasing current density will increase tensile strength of the deposited nickel. | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||
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