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==Breakdown voltage measurements==


===Breakdown voltage measurements===
In order to evaluate the quality of the oxide layers that can be grown in the oxidation furnaces, some breakdown voltage measurement have been made.


Breakdown measurements have been done for A1 Boron Drive-in/Pre-dep furnace, A2 Gate Oxide furnace and A3 Phosphorus drive-in furnaces in November 2021.
For E1  Oxidation (8") furnace, it has been done in Febuary 2022.
The results can be found on this page:
The results can be found on this page:


*[[Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements]]
*[[Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements]]
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thermal_Process/Oxidation"