Specific Process Knowledge/Thin film deposition/Deposition of Silver: Difference between revisions
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== Deposition of | == Deposition of silver == | ||
Silver can be deposited by e-beam evaporation, by sputtering and by thermal evaporation. In the chart below you can compare the different methods on the different deposition equipment. | Silver can be deposited by e-beam evaporation, by sputtering and by thermal evaporation. In the chart below you can compare the different methods on the different deposition equipment. | ||
== Sputter deposition of silver == | |||
== Sputter deposition of | |||
* [[Specific Process Knowledge/Thin film deposition/Lesker |Sputter deposition of Silver in Lesker]]. | * [[Specific Process Knowledge/Thin film deposition/Lesker |Sputter deposition of Silver in Lesker]]. | ||
== Thermal deposition of silver == | |||
== Thermal deposition of | |||
* [[/Deposition of Silver in Thermal Evaporator|Thermal deposition of Silver in the Thermal Evaporator]] | * [[/Deposition of Silver in Thermal Evaporator|Thermal deposition of Silver in the Thermal Evaporator]] | ||
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==Comparison of Deposition Equipment for Silver== | ==Comparison of Deposition Equipment for Silver== | ||
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*Up to 4x6" wafers or | *Up to 4x6" wafers or | ||
*Up to 3x8" wafers | *Up to 3x8" wafers | ||
or | |||
*smaller pieces | *smaller pieces | ||
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*Almost any as long as it does not outgas if you plan to use substrate heating. See cross-contamination sheets in Labmanager. | *Almost any as long as it does not outgas if you plan to use substrate heating. See cross-contamination sheets in Labmanager. | ||
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*Almost any as long as it does not outgas. See cross-contamination | *Almost any as long as it does not outgas. See cross-contamination sheet in Labmanager. | ||
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*Almost any | * Almost any that do not degas. See also the [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=244 cross-contamination sheet] | ||
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*Almost any | *Almost any that does not degas at your intended substrate temperature. See cross contamination sheets for [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=441 PC1] and [https://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=442 PC3] | ||
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! Comment | ! Comment | ||
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'''**''' ''For thicknesses above 200 nm please get permission from ThinFilm group by writing to metal@nanolab.dtu.dk'' | '''**''' ''For thicknesses above 200 nm please get permission from ThinFilm group by writing to metal@nanolab.dtu.dk'' | ||