Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
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'''Imaging Equipment:''' | |||
*[[Specific_Process_Knowledge/Characterization/Optical_microscope|Optical Microscopes]] | |||
*[[Specific_Process_Knowledge/Characterization/ | *[[Specific_Process_Knowledge/Characterization/Sensofar S Neox|Optical Profiler (e.g. ''Sensofar S Neox'')]] | ||
*[[Specific_Process_Knowledge/Characterization/ | *[[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy|Scanning Electron Microscopy (SEM)]] | ||
*[[Specific_Process_Knowledge/Characterization/ | *[[Specific_Process_Knowledge/Characterization/AFM:_Atomic_Force_Microscopy|Atomic Force Microscopy (AFM)]] | ||
*[[Specific_Process_Knowledge/Characterization/Dektak XTA|Stylus Profiler (e.g ''Dektak XTA'')]] | |||
*[[Specific_Process_Knowledge/Characterization/Dektak XTA| | |||
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==Comparison of optical microscope, optical profiler, SEM, AFM and stylus profiler for sample imaging== | ==Comparison of optical microscope, optical profiler, SEM, AFM and stylus profiler for sample imaging== | ||
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== Optical Microscopes == | |||
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There is a lot of [[Specific Process Knowledge/Characterization/Optical microscope|optical microscopes]] scattered around in the cleanroom because they are in great need. They are useful if, for instance, you need to | There is a lot of [[Specific Process Knowledge/Characterization/Optical microscope|optical microscopes]] scattered around in the cleanroom because they are in great need. They are useful if, for instance, you need to | ||
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One of the advantages of the optical microscopes is that they provide fast and easy accessible information about any sample without any kind of sample preparation. They do, however, also have some limitations. Since the depth of focus is quite limited, especially at high magnifications, one will experience problems when trying to image structures that have been etched more than some 10 µm: One cannot focus on both the top and the bottom at the same time. Another disadvantage is the physical limit to the resolution that makes it impossible to image structures below 1 µm. | One of the advantages of the optical microscopes is that they provide fast and easy accessible information about any sample without any kind of sample preparation. They do, however, also have some limitations. Since the depth of focus is quite limited, especially at high magnifications, one will experience problems when trying to image structures that have been etched more than some 10 µm: One cannot focus on both the top and the bottom at the same time. Another disadvantage is the physical limit to the resolution that makes it impossible to image structures below 1 µm. | ||
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== | == Optical Profilers == | ||
An optical profiler, f.ex. [[Specific Process Knowledge/Characterization/Sensofar S Neox|Sensofar S Neox]], provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument. | |||
The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | The main purpose is 3D topographic imaging of surfaces, Step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | ||
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== | == Scanning Electron Microscopes (SEM)== | ||
Both shortcomings of the optical microscopes mentioned above are addressed by the use of a beam of electrons (as you do in a SEM) instead of light. The depth of focus and the resolution of a [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy|scanning electron microscope]] are at least one order of magnitude better. The list of advantages of a SEM compared to an optical microscope includes: | Both shortcomings of the optical microscopes mentioned above are addressed by the use of a beam of electrons (as you do in a SEM) instead of light. The depth of focus and the resolution of a [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy|scanning electron microscope]] are at least one order of magnitude better. The list of advantages of a SEM compared to an optical microscope includes: | ||
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* Hardware: In order to work the SEM needs a chamber under vacuum and sophisticated electronics. | * Hardware: In order to work the SEM needs a chamber under vacuum and sophisticated electronics. | ||
* Sample preparation and mounting: You may have to prep your sample in several ways, either coating, cleaving or mounting on specific sample holders. | * Sample preparation and mounting: You may have to prep your sample in several ways, either coating, cleaving or mounting on specific sample holders. | ||
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== | == Atomic Force Microscope (AFM)== | ||
The [[Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy|atomic force microscope]] has limited use as a sample imaging instrument. In some cases the resolution of the SEM is not enough: | The [[Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy|atomic force microscope]] has limited use as a sample imaging instrument. In some cases the resolution of the SEM is not enough: | ||