LabAdviser/Courses/TPT Ebeam: Difference between revisions
| (2 intermediate revisions by 2 users not shown) | |||
| Line 22: | Line 22: | ||
'''Creating the *.v30 file''' | '''Creating the *.v30 file''' | ||
To prepare the *.v30 file from your design, you will need to use a special software called "[[Specific Process Knowledge/Lithography/EBeamLithography/BEAMER|'''Beamer''']]". You can access the software at the computers in the EBL room inside the cleanroom or in the "copy room" (building 346, '''room XX'''). You can read more about how to use "Beamer" and how to create the design file under [[Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation|'''JEOL Job Preparation''']]. | To prepare the *.v30 file from your design, you will need to use a special software called "[[Specific Process Knowledge/Lithography/EBeamLithography/BEAMER|'''Beamer''']]". You can access the software at the computers in the EBL room inside the cleanroom or in the "copy room" (building 346, '''room XX'''). You can read more about how to use "Beamer" and how to create the design file under [[Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation|'''JEOL Job Preparation''']]. To find more information about advanced features under [[Specific Process Knowledge/Lithography/EBeamLithography/BEAMER|'''Beamer''']]. If you cannot manage to create the *.v30 files on your own, we will cover this during the "files training". | ||
'''Creating the sdf and jdf files''' | '''Creating the sdf and jdf files''' | ||
| Line 31: | Line 31: | ||
== Training for Raith e-LINE == | == Training for Raith e-LINE == | ||
The training on the Raith e-LINE consists of two sessions at the tool. | The training on the Raith e-LINE consists of two sessions at the tool. | ||
* '''First training''': we show you how to run the first exposure or auto imaging, please read the manual on labmanager and if need auto imaging watch the video [https://youtu.be/YoZF_6FeVb4?si=9Jr2Be6I1kdztJtT here] | |||
* '''Second training:''' the user demonstrates the ability to operate the tool independently. | |||
* '''File preparation:''' the system accepts gds, and cif files, incase a proximity error correction is needed one can use [[Specific Process Knowledge/Lithography/EBeamLithography/BEAMER|'''Beamer''']] software (please check manual on how to export the file). | |||
Due to the tool’s various functionalities, the content covered during training may vary depending on the user's intended use. | |||
Before attending the training, users must fulfill the following prerequisites: | Before attending the training, users must fulfill the following prerequisites: | ||