|
|
| (2 intermediate revisions by the same user not shown) |
| Line 1: |
Line 1: |
| {{cc-nanolab}
| | to be deleted, info copied to pages with respective tool name |
|
| |
|
| '''Feedback to this page''': '''[mailto:Characterization@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler click here]'''
| | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_XTA |
|
| |
|
| [[Category: Equipment|Characterization Profiler]]
| | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Tencor_P17 |
| [[Category: Characterization|Profiler]]
| |
|
| |
|
| DektakXTA info copied to
| |
| https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_XTA#Performance_and_Process_Parameters
| |
|
| |
| P17 info copied to
| |
| https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Tencor_P17#Tencor_P17_Stylus_Profiler
| |
|
| |
| info moved to
| |
| https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Sensofar_S_Neox | | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Sensofar_S_Neox |
|
| |
|
| info moved to
| |
| https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Filmetrics | | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Filmetrics |
|
| |
|
| info moved to
| | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_3ST |
| https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_3ST#Dektak_3ST | |
| | |
| == Stylus Profiler: Dektak150 ==
| |
| | |
| | |
| [[image:Dektak150.JPG|300x300px|right|thumb|Stylus profiler:Dektak150, currently located in building 451, room 913 (as of 2023).]]
| |
| | |
| The stylus profiler Dektak150 is intended for profile measurements on samples outside the cleanroom. The Dektak150 is especially well suited for measuring soft samples as it can be adjusted to apply lower force than the other stylus profilers at Nanolab.
| |
| | |
| | |
| '''The user manual, technical information and contact information can be found in LabManager:'''
| |
| | |
| [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=457 Stylus profiler:Dektak150 in LabManager]
| |
| | |
| The computer is not connected to the network but data can be saved on a dedicated USB and transfered to a computer on the network.
| |
| | |
| Info about measurement accuracy can be found [[/Stylus profiler measurement uncertainty|here]].
| |
| | |
| ===Equipment performance and process related parameters===
| |
|
| |
|
| {| border="2" cellspacing="0" cellpadding="10"
| | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_150 |
| |-
| |
| !style="background:silver; color:black;" align="left"|Purpose
| |
| |style="background:LightGrey; color:black"|Profiler for measuring micro structures|
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *Single line profiles
| |
| *Surface roughness on a line scan
| |
| |-
| |
| !style="background:silver; color:black;" align="left"|Location
| |
| |style="background:LightGrey; color:black"|Building 347, room 080
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *North-East corner of the building, in the basement
| |
| *When you enter the building from the East, you enter directly into the basement.
| |
| |-
| |
| !style="background:silver; color:black" align="left" rowspan="5" valign="top" |Performance
| |
| |style="background:LightGrey; color:black"|Scan range x y
| |
| |style="background:WhiteSmoke; color:black"|
| |
| Line scan x: 50 µm to 55 mm in a single scan
| |
| |-
| |
| |style="background:LightGrey; color:black"|Scan range z
| |
| |style="background:WhiteSmoke; color:black"|
| |
| 50 Å to 1 mm
| |
| |-
| |
| |style="background:LightGrey; color:black"|Resolution x y
| |
| |style="background:WhiteSmoke; color:black"|
| |
| Theoretically down to 0.003 µm (in practice the resolution is limited by the tip size)
| |
| |-
| |
| |style="background:LightGrey; color:black"|Resolution z
| |
| |style="background:WhiteSmoke; color:black"|
| |
| 1Å (@65kÅ), 10Å (@655 kÅ), 80 Å (@5240 kÅ), 160 Å (@1mm)
| |
| |-
| |
| |style="background:LightGrey; color:black"|Maximum sample thickness
| |
| |style="background:WhiteSmoke; color:black"|
| |
| 100 mm
| |
| |-
| |
| |-
| |
| !style="background:silver; color:black" align="left"|Hardware settings
| |
| |style="background:LightGrey; color:black"|Tip radius
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *5 µm 45<sup>o</sup> cone
| |
| *0.2 µm 45<sup>o</sup> cone on request
| |
| |-
| |
| !style="background:silver; color:black" align="left" rowspan="5" valign="top" |Substrates
| |
| |style="background:LightGrey; color:black"|Substrate size
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *Up to 6"
| |
| |-
| |
| | style="background:LightGrey; color:black"|Substrate materials allowed
| |
| |style="background:WhiteSmoke; color:black"|
| |
| *In principle all materials
| |
| |-
| |
| |}
| |
