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Specific Process Knowledge/Characterization/Filmetrics: Difference between revisions

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Created page with "==Optical Profiler (Filmetrics)== {{CC-bghe2}} <br> 275x275px|right|thumb|Optical Profiler (Filmetrics): positioned in the basement (346-904), {{photo1}} The Profilm3D optical profiler from Filmetrics uses white-light-interferometry (WLI) and phase-shifting-interferometry (PSI) to produce surface profiles and depth-of-field color images. The main purpose is 3D topographic imaging of surfaces, step height measurements and roughnes..."
 
Mmat (talk | contribs)
 
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==Optical Profiler (Filmetrics)==
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Tencor_P17 click here]'''
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[[Category:Equipment|Characterization Profiler]]
[[Category:Characterization|Profiler]]
 
=Filmetrics (Optical Profiler)=
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[[image:Scanner without anotation.jpg|275x275px|right|thumb|Optical Profiler (Filmetrics): positioned in the basement (346-904), {{photo1}}]]
[[image:Scanner without anotation.jpg|275x275px|right|thumb|Optical Profiler (Filmetrics): positioned in the basement (346-904), {{photo1}}]]
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'''The user manual, technical information and contact information can be found in LabManager (requires login):'''
The user manual, technical information and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=467 LabManager].
 
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=467 Optical profiler (Filmetrics) info page in LabManager]






===Equipment performance and process related parameters===
===Performance and Process Parameters===


{| border="2" cellspacing="0" cellpadding="10"  
{| border="2" cellspacing="0" cellpadding="10"  


!colspan="2" border="none" style="background:silver; color:black;" align="center"|<b>Equipment</b>
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
|style="background:WhiteSmoke; color:black"|<b>Optical profiler</b>
|style="background:WhiteSmoke; color:black"|<b>Optical profiler</b>
|-
|-