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| {{cc-nanolab}
| | to be deleted, info copied to pages with respective tool name |
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| '''Feedback to this page''': '''[mailto:Characterization@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Profiler click here]'''
| | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_XTA |
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| [[Category: Equipment|Characterization Profiler]]
| | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Tencor_P17 |
| [[Category: Characterization|Profiler]]
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| DektakXTA info copied to
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| https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_XTA#Performance_and_Process_Parameters
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| P17 info copied to
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| https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Tencor_P17#Tencor_P17_Stylus_Profiler
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| info moved to
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| https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Sensofar_S_Neox | | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Sensofar_S_Neox |
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| ==Optical Profiler (Filmetrics)==
| | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Filmetrics |
| {{CC-bghe2}} <br>
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| [[image:Scanner without anotation.jpg|275x275px|right|thumb|Optical Profiler (Filmetrics): positioned in the basement (346-904), {{photo1}}]]
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| The Profilm3D optical profiler from Filmetrics uses white-light-interferometry (WLI) and phase-shifting-interferometry (PSI) to produce surface profiles and depth-of-field color images.
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| The main purpose is 3D topographic imaging of surfaces, step height measurements and roughness measurements with larger FOV (Field Of View) than the AFM, but less horisontal resolution.
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| For most samples the optical profiler provides fast and easy information without any sample preparation. However, it can be necessary to cover thin transparent layers (< 2 µm) with a thin layer of metal.
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| The resolution is limited by the objective and the sampling resolution.
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| '''The user manual, technical information and contact information can be found in LabManager (requires login):'''
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| [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=467 Optical profiler (Filmetrics) info page in LabManager]
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| ===Equipment performance and process related parameters===
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| {| border="2" cellspacing="0" cellpadding="10"
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| !colspan="2" border="none" style="background:silver; color:black;" align="center"|<b>Equipment</b>
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| |style="background:WhiteSmoke; color:black"|<b>Optical profiler</b>
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| |-
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"|3D topographic imaging of surfaces.||style="background:WhiteSmoke; color:black"|
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| *3D imaging of surfaces
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| *Roughness measurements
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| *Step height measurements
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| *3D topographic measurements
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| |-
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| !style="background:silver; color:black;" align="left"|Posibilities
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| |style="background:LightGrey; color:black"|Interferometric profiling||style="background:WhiteSmoke; color:black"|
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| *Standard microscope imaging
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| *PSI (Phase Shift Interferometry)
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| *WLI (White light Interferometry)
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| *Stitched scans
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| *Wafer mapping
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| !style="background:silver; color:black" align="left"|Performance
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| |style="background:LightGrey; color:black"|With the current 10x objective||style="background:WhiteSmoke; color:black"|
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| [https://labmanager.dtu.dk/view_binary.php?fileId=4174 See here the data sheet for this instrument (requires login)]]
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| !style="background:silver; color:black" align="left"|Substrates
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| |style="background:LightGrey; color:black"|Substrate size
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| |style="background:WhiteSmoke; color:black"|
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| *Substrates no bigger than 100 mm x 100mm
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| |style="background:silver; color:black"|
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| | style="background:LightGrey; color:black"|Substrate materials allowed
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| |style="background:WhiteSmoke; color:black"|
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| *In principle all materials
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| |}
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| == Dektak 3ST ==
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| [[image:III-V profiler.JPG|300x300px|right|thumb|The profiler placed in 346-904 (Dektak 3ST).]]
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| The Dektak 3ST is intended for profile measurements on samples outside the cleanroom. It is located in the basement, building 346, room 904.
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| '''The user manual, technical information and contact information can be found in LabManager:'''
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| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=184 Dektak 3ST (Dektak) in LabManager]
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| The computer connected to the Dektak 3ST is pretty old and runs Windows 98 SE. It is not connected to the network but traces can be saved on either USB memory stick or floppy disk. The USB driver is an old universal driver and has been shown to work with small size USB sticks. However it did not work with an 8GB Kingston stick.
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| ===Equipment performance and process related parameters===
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| {| border="2" cellspacing="0" cellpadding="10"
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| !style="background:silver; color:black" align="left" rowspan="4" valign="top" |Performance
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| |style="background:LightGrey; color:black"|Vertical Range
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| |style="background:WhiteSmoke; color:black"|
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| *65 kÅ, 655 kÅ, 1310 kÅ
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| |style="background:LightGrey; color:black"|Scan length range
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| |style="background:WhiteSmoke; color:black"|
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| *50-50000 µm
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| |style="background:LightGrey; color:black"|Stylus track force
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| |style="background:WhiteSmoke; color:black"|
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| *Recommended: 3-10 mg, depending on the softness of the surface
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| |style="background:LightGrey; color:black"|Scan speed ranges
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| |style="background:WhiteSmoke; color:black"|
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| *High speed: 3s for 50µm to 50000µm
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| *Medium speed: 12s for 50µm to 10000µm
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| *Low speed: 50s
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| !style="background:silver; color:black" align="left" rowspan="1" valign="top" |Materials
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| |style="background:LightGrey; color:black"|Allowed substrate materials
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| |style="background:WhiteSmoke; color:black"|
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| *III-V
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| * Silicon
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| * polymer
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| |}
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| == Stylus Profiler: Dektak150 ==
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| [[image:Dektak150.JPG|300x300px|right|thumb|Stylus profiler:Dektak150, currently located in building 451, room 913 (as of 2023).]]
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| The stylus profiler Dektak150 is intended for profile measurements on samples outside the cleanroom. The Dektak150 is especially well suited for measuring soft samples as it can be adjusted to apply lower force than the other stylus profilers at Nanolab.
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| '''The user manual, technical information and contact information can be found in LabManager:'''
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| [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=457 Stylus profiler:Dektak150 in LabManager]
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| The computer is not connected to the network but data can be saved on a dedicated USB and transfered to a computer on the network.
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| Info about measurement accuracy can be found [[/Stylus profiler measurement uncertainty|here]].
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| ===Equipment performance and process related parameters=== | | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_3ST |
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| {| border="2" cellspacing="0" cellpadding="10"
| | https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/Dektak_150 |
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"|Profiler for measuring micro structures|
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| |style="background:WhiteSmoke; color:black"|
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| *Single line profiles
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| *Surface roughness on a line scan
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| !style="background:silver; color:black;" align="left"|Location
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| |style="background:LightGrey; color:black"|Building 347, room 080
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| |style="background:WhiteSmoke; color:black"|
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| *North-East corner of the building, in the basement
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| *When you enter the building from the East, you enter directly into the basement.
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| !style="background:silver; color:black" align="left" rowspan="5" valign="top" |Performance
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| |style="background:LightGrey; color:black"|Scan range x y
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| |style="background:WhiteSmoke; color:black"|
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| Line scan x: 50 µm to 55 mm in a single scan
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| |style="background:LightGrey; color:black"|Scan range z
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| |style="background:WhiteSmoke; color:black"|
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| 50 Å to 1 mm
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| |style="background:LightGrey; color:black"|Resolution x y
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| |style="background:WhiteSmoke; color:black"|
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| Theoretically down to 0.003 µm (in practice the resolution is limited by the tip size)
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| |style="background:LightGrey; color:black"|Resolution z
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| |style="background:WhiteSmoke; color:black"|
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| 1Å (@65kÅ), 10Å (@655 kÅ), 80 Å (@5240 kÅ), 160 Å (@1mm)
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| |-
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| |style="background:LightGrey; color:black"|Maximum sample thickness
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| |style="background:WhiteSmoke; color:black"|
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| 100 mm
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| !style="background:silver; color:black" align="left"|Hardware settings
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| |style="background:LightGrey; color:black"|Tip radius
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| |style="background:WhiteSmoke; color:black"|
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| *5 µm 45<sup>o</sup> cone
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| *0.2 µm 45<sup>o</sup> cone on request
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| |-
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| !style="background:silver; color:black" align="left" rowspan="5" valign="top" |Substrates
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| |style="background:LightGrey; color:black"|Substrate size
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| |style="background:WhiteSmoke; color:black"|
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| *Up to 6"
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| | style="background:LightGrey; color:black"|Substrate materials allowed
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| |style="background:WhiteSmoke; color:black"|
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| *In principle all materials
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| |-
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| |}
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