Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420: Difference between revisions
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'''<p style="color:red;">The KLA-Tencor Surfscan 6420 has has been decommisioned in April 2023 and replaced with the [[Specific_Process_Knowledge/Characterization/Particle_Scanner_Takano|Particle Scanner Takano]]. </p>''' | '''<p style="color:red;">The KLA-Tencor Surfscan 6420 has has been decommisioned in April 2023 and replaced with the [[Specific_Process_Knowledge/Characterization/Particle_Scanner_Takano|Particle Scanner Takano]]. </p>''' | ||
= KLA-Tencor Surfscan 6420 = | |||
[[image:Surfscan_at_FAT.JPG|300x300px|right|thumb|The KLA-Tencor Surfscan (at the place in California where it was refurbished).]] | [[image:Surfscan_at_FAT.JPG|300x300px|right|thumb|The KLA-Tencor Surfscan (at the place in California where it was refurbished).]] | ||
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'''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=318 Surfscan 6420]''' | '''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=318 Surfscan 6420]''' | ||
== Acceptance Test== | == Acceptance Test== | ||
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'''4" and 8" cassette''': A cassette of 25 wafers was handled two times. The scanning was then stopped to save time as handling of more cassettes is not expected to cause problems. | '''4" and 8" cassette''': A cassette of 25 wafers was handled two times. The scanning was then stopped to save time as handling of more cassettes is not expected to cause problems. | ||
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== | ==Process Parameters== | ||
{| border="2" cellspacing="0" cellpadding="2" | {| border="2" cellspacing="0" cellpadding="2" | ||