Specific Process Knowledge/Back-end processing/Polishing machine: Difference between revisions

Latest revision as of 16:54, 17 June 2025

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The Polisher/Lapper has been decomissioned end of 2024.

The Logitech PM5 Polisher/Lapper is for thinning down wafers and other substrates.

Equipment		Polisher/Lapper
Purpose	Thinning of substrates of	InP GaAs Silicon Metals Glass/Quartz
Performance	Thinning	Removal rate: 1-10µm/min Thickness accuracy: +/- 10 µm Thickness homogeneity: +/- 10 µm Roughness: +/- ? µm
Performance	Polishing	Removal rate: ~1 µm/min Thickness accuracy: ? µm Thickness homogeneity: ? µm Roughness: +/- ? µm
Process parameter range	Polishing liquid	Al2O3 (alumina) powder: 3, 9 or 20 µm Chemlox (for polishing) SF1 Polishing Fluid (for polishing e.g. SiO2)
	Polishing cloths	Chemcloth Polishing Cloths (for use with SF1 liquid)
	Rotation speed	Thinning: 5-20 rpm Polishing: 5-80 rpm
	Arm sweep	Thinning: stationary Polishing: 12% (inner) - 80% (outer)
Substrates	Batch size	# small samples one 50 mm wafer one 100 mm wafer
	Allowed materials	InP GaAs Silicon Metals Glass/Quartz

@@ Line 3: / Line 3: @@
 '''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Back-end_processing/Die_Bonder click here]'''
+'''<p style="color:red;">The Polisher/Lapper has been decomissioned end of 2024.</p>
-<big>''' Machine decommissioned end of 2024 '''
-</big>
 == Polisher/Lapper ==
-'''<p style="color:red;">The Polisher/Lapper has been decomissioned end of 2024.</p>
-<!-- copyright issue rkc -->
-<!-- copyright issue rkc [[image:Logitech pm5 1.jpg|400px|right|thumb|The Logitech PM5 Polisher/Lapper]]
-Training is required before using th machine. The machine is equipped with a LabManager lock.-->
-The Logitech PM5 Polisher/Lapper is for thinning down wafers and other substrates.
-'''The user manual, user APV, technical information and contact information can be found in LabManager:'''
-<!-- remember to remove the type of documents that are not present -->
-<!-- give the link to the equipment info page in LabManager: -->
+The Logitech PM5 Polisher/Lapper is for thinning down wafers and other substrates.
-[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=299 The Logitech PM5 Polisher/Lapper in LabManager]
 ==Equipment performance and process related parameters==