Specific Process Knowledge/Imprinting: Difference between revisions
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== Stamp for imprint == | == Stamp for imprint == | ||
A stamp for imprint lithography is usually made in Si or SiO, however other materials could also be used. | A stamp for imprint lithography is usually made in Si or SiO, however other materials could also be used. | ||
Here is a process flow for stamp made of SU8 resist.[[ | Here is a process flow for stamp made of SU8 resist.[[Media:Stamp Fabrication.docx| Stamp fabrication flow.]] | ||
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