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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus/nanoetch/nano12 click here]'''
<!--Checked for updates on 30/7-2018 - ok/jmli -->
<!--Checked for updates on 5/10-2020 - ok/jmli -->
<!--Checked for updates on 4/9-2025 - ok/jmli -->
== The nano1.2 recipe ==
== The nano1.2 recipe ==
{{Template:Author-jmli1}}
<!--Checked for updates on 2/02-2023 - ok/jmli -->


{| border="2" cellpadding="2" cellspacing="1"  
{| border="2" cellpadding="2" cellspacing="1"  
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| align="center" style="background:#f0f0f0;"|'''Std'''
| align="center" style="background:#f0f0f0;"|'''Std'''
|-
|-
| ER||nm/min||241||285||307||325||335||299||37
| Etch rates||nm/min||241||285||307||325||335||299||37
|-
|-
| SA||degs||92||92||92||91||91||92||0
| Sidewall angle ||degs||92||92||92||91||91||92||0
|-
|-
| base||nm/edge||-5||-8||-18||-18||-34||-17||11
| CD loss ||nm/edge||-5||-8||-18||-18||-34||-17||11
|-
|-
| foot||nm/edge||-5||-8||-18||-18||-4||-10||7
| CD loss foot||nm/edge||-5||-8||-18||-18||-4||-10||7
|-
|-
| Bowing||||19||11||11||14||10||13||4
| Bowing||||19||11||11||14||10||13||4
|-
|-
| Curve||||-48||-46||-43||-40||-40||-44||4
| Curvature ||||-48||-46||-43||-40||-40||-44||4
|-
|-
| zep||nm/min||||||||||||95||
| Zep etch rate||nm/min||||||||||||95||
|-
|-
|  
|  
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