Specific Process Knowledge/Wafer cleaning: Difference between revisions
m →Masks |
mNo edit summary |
||
| (3 intermediate revisions by the same user not shown) | |||
| Line 1: | Line 1: | ||
== Cleaning of wafers == | == Cleaning of wafers == | ||
__NOTOC__ | __NOTOC__ | ||
| Line 26: | Line 16: | ||
===Items that have been outside the cleanroom=== | ===Items that have been outside the cleanroom=== | ||
Before bringing samples into the cleanroom you have to get approval from Nanolab. The approval process and cleaning procedure is described on [[Specific_Process_Knowledge/Wafer_cleaning/ | Before bringing samples into the cleanroom you have to get approval from Nanolab ("Bring samples into cleanroom"-procedure). The approval process and cleaning procedure is described on <b>[[Specific_Process_Knowledge/Wafer_cleaning/Bring_samples_into_Cleanroom_or_PolyFabLab| here]]</b>. Please note that the approval for bringing samples into the cleanroom is personal (and fellow group members need to send in seperate request). | ||
<br/> | <br/> | ||
<br/> | <br/> | ||