Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
m →Tip Wear: Minor Layout changes |
m →An overview of the performance of the AFM Icon: then -> than |
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|[[#Height Accuracy|Height (z) accuracy]] | |style="background:LightGrey; color:black"|[[#Height Accuracy|Height (z) accuracy]] | ||
|style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better | |style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better than 0.75% | ||
|style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better | |style="background:WhiteSmoke; color:black"|better than 2% (at 200 nm), typically better than 0.75% | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
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* Size: 1µm | * Size: 1µm | ||
* Scan Speed: 1Hz | * Scan Speed: 1Hz | ||
* Samples/line: 256 | |||
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* Scan mode: PeakForce Tapping | * Scan mode: PeakForce Tapping | ||
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* Size: 1µm | * Size: 1µm | ||
* Scan Speed: 1Hz | * Scan Speed: 1Hz | ||
* Samples/line: 256 | |||
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! Roughness information | ! Roughness information | ||