Specific Process Knowledge/Etch/Etching of Silicon Nitride: Difference between revisions
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*[[Specific Process Knowledge/Etch/Wet Silicon Nitride Etch|Wet Silicon Nitride Etch]] | *[[Specific Process Knowledge/Etch/Wet Silicon Nitride Etch|Wet Silicon Nitride Etch]] | ||
*[[Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Silicon Nitride Etch using AOE|Etch of Silicon Nitride using AOE]] | *[[Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Silicon Nitride Etch using AOE|Etch of Silicon Nitride using AOE]] | ||
*[[Specific_Process_Knowledge/Etch/Etching_of_Silicon_Oxide/SiO2_etch_using_ASE|Nitride etch using ASE]] | |||
*[[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/Ion Beam Etching using IBSD Ionfab 300]] | *[[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/Ion Beam Etching using IBSD Ionfab 300]] | ||
*[[Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_nitride|Silicon nitride etch using the ICP metal]] | *[[Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon_nitride|Silicon nitride etch using the ICP metal]] | ||
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![[Specific Process Knowledge/Etch/Wet Silicon Nitride Etch|Wet Silicon Nitride Etch]] | ![[Specific Process Knowledge/Etch/Wet Silicon Nitride Etch|Wet Silicon Nitride Etch]] | ||
![[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|BHF]] | ![[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|BHF]] | ||
!Pegasus 4 | ![[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-4|Pegasus 4]] | ||
![[Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)|AOE (Advanced Oxide Etch)]] | ![[Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)|AOE (Advanced Oxide Etch)]] | ||
![[Specific Process Knowledge/Etch/ASE_(Advanced_Silicon_Etch)|ASE]] | ![[Specific Process Knowledge/Etch/ASE_(Advanced_Silicon_Etch)|ASE]] | ||