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=Introductory Courses to DTU Nanolab Facilities=
We have made a number of courses to prepare our users for their work in our cleanroom facility and available equipment, as well as training for our other facilities. Below you find a list of available courses. The Safety Introduction Course is mandatory for all users that need to use our cleanroom facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you want to use.


= Tool Package Training (TPT) =
For selected equipment groups, we have created online introductory courses called Tool Package Training (TPT) that provide a comprehensive overview of both the theoretical principles behind the processes and the equipment used. These courses also include video demonstrations showcasing the operation of the equipment available in our cleanroom facilities. The completion of the respective TPTs are mandatory for all academic users before hands-on training on specific equipment can be requested. While we strongly recommend commercial users to take the online courses as well, only the video demonstrations showcasing the operation of the equipment are mandatory.


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{| border="1" cellspacing="1" cellpadding="3" style="text-align:left;"  
! style="background:Black; color:white" width="3%" align="center" |Course
! style="background:Black; color:white" width="3%" align="center" |Course
! style="background:Black; color:white" width="5%" align="center" |Mandatory ...
! style="background:Black; color:white" width="5%" align="center" |Requirement
! style="background:Black; color:white" width="10%" align="center" |Short Course Decription
! style="background:Black; color:white" width="10%" align="center" |Description
|-
|- style="background:LightGrey; color:black" valign="center"
!Safety Introduction Course
|for working inside the cleanroom
|Theoretical and practical safety training. All new cleanroom users must obtain DTU Nanolab’s introduction course certificate before access to the cleanroom is granted. Find more information and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/introduction-course here].
|-
|- style="background:WhiteSmoke; color:black" valign="center"
!Safety Introduction Course for "Other Facilities"
|for working in other Nanolab facilities
|DTU Nanolab offers a range of open access laboratories dedicated to both fabrication and characterization purposes. These facilities are situated in buildings 307, 346, and 347. Find more information and sign up [https://www.nanolab.dtu.dk/access/other-facilities here].
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!SEM TPT
!Thin Film TPT
|for getting access to SEMs in [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy 346] and [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/314/Microscopy_314-307 307 and 314]
|for getting access to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition Thin Film Deposition] & [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thermal_Process Thermal Growth Equipment]
|This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. It is also irregularly held as in-person lecture at DTU Nanolab. The course is a prerequisite for hands-on training on any of the SEMs in building 307 and 314, and 346 at DTU Nanolab and for the SEM in building 375 at DTU Offshore. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here].  
|This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Thin_Film Thin Film TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here].  
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!Thin Film TPT
!SEM TPT
|for getting access to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition Thin Film Deposition & Thermal Growth Equipment]
|for getting access to SEMs in [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy 346] and [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/314/Microscopy_314-307 314/307]
|This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Thin_Film Thin Film TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here].  
|This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346/347 at DTU Nanolab. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here].  
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=Master and Ph.D courses=
= Equipment Tutorials =
For selected equipment, we have created online courses called exxplaining the operation (hardware and software) of our equipment. These tutorials are mandatory for all users before hands-on training on specific equipment can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].  


There are a number of master and Ph.D courses available at or in cooperation with DTU Nanolab and its facilities.
<BR>
<BR>
{| border="1" cellspacing="1" cellpadding="3" style="text-align:left;"  
{| border="1" cellspacing="1" cellpadding="3" style="text-align:left;"  
! style="background:Black; color:white" width="3%" align="center" |Course
! style="background:Black; color:white" width="3%" align="center" |Course
! style="background:Black; color:white" width="5%" align="center" |Course Type
! style="background:Black; color:white" width="5%" align="center" |Requirement
! style="background:Black; color:white" width="10%" align="center" |Course Decription
! style="background:Black; color:white" width="10%" align="center" |Description
|-
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|- style="background:LightGrey; color:black" valign="center"
|- style="background:LightGrey; color:black" valign="center"
!M.Sc. course: 10851 - Introduction to Cleanroom-based Microfabrication
!E-beam Lithography
|for master students
|for getting access to [[Specific Process Knowledge/Lithography/EBeamLithography | E-beam Lithography Tools]]
|The overall aim of the course is to provide you with theoretical background and hands-on experience in the most common experimental techniques used for Silicon microfabrication. You will be introduced to microfabrication methods such as photolithography, etching, thin film deposition and characterization techniques such as scanning electron microscopy (SEM) and profilometry. During the course students will fabricate a working pressure sensor and characterize it in the DTU Nanolab cleanroom. This will enable you to design a fabrication process, draw a lithographic mask and work safely in the DTU Nanolab cleanroom. The TPT courses are a main part of the course. The course gives you 5 ECTS points. Find more information and sign up [https://kurser.dtu.dk/course/10851 here].
|This online tutorial will be part of the E-beam TPT and is currently under prepration. <!-- ADDED WHEN TPT IS READY: It will include theory on electron beam lithography and equipment, as well as training in preparation of  exposure files and equipment operation.!--> The course is a prerequisite for hands-on training on the electron beam tool. Find more information about the training in the [[LabAdviser/Courses/TPT Ebeam|TPT E-beam]].  
|-
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|- style="background:WhiteSmoke; color:black" valign="center"
!M.Sc. course: 10855 - Advanced fabrication of micro- and nanostructures
!Ellipsometer VASE
|for master students
|for getting access to the [[Specific Process Knowledge/Characterization/Optical characterization#Ellipsometer VASE and Ellipsometer M-2000V|Ellipsometers]]
|In this course, you will learn how to fabricate micro- and nanostructures, and microdevices in DTUs cleanroom. You will be introduced to the most advanced processes and tools in the cleanroom, and you will receive training in operating some of these tools yourself. You will learn how to engineer a specific micro/nanostructure or microdevice from a starting point defined by its desired functionality, and you will learn systematic methods for how to convert this information to appropriate choices of fabrication tools, process sequences, and characterisation steps. The course gives you 5 ECTS points. Prerequisites: 22600/10851/10852 or equivalent courses in introduction to cleanroom based microfabrication. Find more information and sign up [https://kurser.dtu.dk/course/10855 here].
|This online course consists of two short online tutorials
* [https://www.jawoollam.com/resources/ellipsometry-tutorial/what-is-ellipsometry  Tutorial ''by Woollam'']
* [https://www.youtube.com/watch?v=EC-oyRhKr0A|Ellipsometer Ellipsometer operation ''by DTU Nanolab'']
|-
|-
|- style="background:LightGrey; color:black" valign="center"
|- style="background:LightGrey; color:black" valign="center"
!M.Sc. course: 10862 - Polymer micro fabrication
! Atomic Force Microscopy
|for master students
| for getting access to the [[Specific Process Knowledge/Characterization/AFM:_Atomic_Force_Microscopy | AFM equipment]]
|The goal of this course is to provide you with hands-on experience in the experimental techniques used for polymer microfabrication and characterization, as well as to give you sufficient background to choose the most suitable techniques for a given application. You will be introduced to fast prototyping techniques such as laser ablation and 3D printing, and to mass fabrication methods such as injection molding. You will analyze a real-world microsystems problem and propose a polymer prototype solution of your own design. The course gives you 5 ECTS points. Find more information and sign up [https://kurser.dtu.dk/course/10862 here].
|This online course consists of three short training videos regarding equipment operation.
* [https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj AFM Icon-PT Operation]
|-
|-
|- style="background:WhiteSmoke; color:black" valign="center"
|- style="background:WhiteSmoke; color:black" valign="center"
!M.Sc. course: 27510 - Biosensors and bioanalysis
! Temescal E-beam evaporator
|for master students
| for getting access to the E-beam Evaporators [[Specific Process Knowledge/Thin film deposition/Temescal | (Temescal)]] or [[Specific Process Knowledge/Thin film deposition/10-pocket e-beam evaporator | (10-Pockets)]]
|The course aims at providing you with training and insights into the multidisciplinary field of biosensors, both in terms of assay design and format, state of the art micro/nanofabrication, and statistical analysis of obtained biosensor data. During the course you will acquire basic understanding of the physical/chemical/biological sensing phenomena that are the basis for modern biosensors with applications within fundamental research, environmental control, biotechnology and medical industry. The course gives you 5 ECTS points. Find more information and sign up [https://kurser.dtu.dk/course/27510 here].
|This online course consists of four short training videos regarding equipment operation.
* [https://www.youtube.com/playlist?list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf Temescal Operation]
|-
|-
|- style="background:LightGrey; color:black" valign="center"
|- style="background:LightGrey; color:black" valign="center"
!Ph.d. course: 56868 (10868) - Methods in Micro and Nanofabrication
! Lesker Dual Chamber Sputter System
|for ph.d. students at Nanolab
| for getting access to the [[Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system | Sputter-System Metal-Oxide(PC1) Metal-Nitride (PC3)]]
|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points. Find more information and sign up [https://kurser.dtu.dk/course/56868 here].
|This online course consists of three short training videos regarding equipment operation for PC1 (Oxide) and PC3 (Nitride)).
* [https://www.youtube.com/watch?v=1WHv36coRUc PC1 (Oxide) and PC3 (Nitride) Operation]
|-
|-
|- style="background:WhiteSmoke; color:black" valign="center"
! XPS
| for getting access to the [[Specific Process Knowledge/Characterization/XPS | XPS]]
|If you already a user at DTU Nanolab and have access to LabManager, please fill the access request form following the link below:
*[http://labmanager.dtu.dk/function.php?module=Request&view=edit&rt=2 Access request form for XPS training]
Else, please contact the Fabrication Support group.
 
This online course presents the theory behind XPS analysis, as well as training in equipment operation in the cleanroom.
* "Theory behind XPS" by ''Technical University of Munich'' (pages 1-16): [[File:Electron Spectroscopy of surfaces.pdf]]
* Youtube video by ''Kent L. Rhodes (McCrone Group)'' hosted by ''Hooke College of Applied Sciences'': [https://www.youtube.com/watch?v=nGQxmOcs2rg "Using XPS for Industrial Problem Solving"]
* Equipment operation by DTU Nanolab:
: [https://www.youtube.com/playlist?list=PLjWVU97LayHBtOkPCSv8QA-sD4Dbz1jrb XPS Operation]
|-
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<!--also available
<br clear="all" />
Oxidation Furnace:
 
https://www.youtube.com/watch?v=Hi-1zN1RVqc
=Links to training videos=
RCA:  
DTU Nanolab has a YouTube channel where we have gathered all our training videos: [https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ]
https://www.youtube.com/watch?v=U81QbZsCX9U&list=PLjWVU97LayHDW8Q1Lxk7RzgAp7nNN0WFF&index=4
 
!-->
We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube
<br>
 
<br clear="all">
==Safety and behavior==
*Nanolab introduction course: Safety in the Cleanroom [https://www.youtube.com/watch?v=Dfu66Ewu4as&t=606s]
*Cleanroom safety at DTU Nanolab [https://www.youtube.com/watch?v=3MoKP1E1LGs&t=5s]
*Working with chemicals in the cleanroom at DTU Nanolab [https://www.youtube.com/watch?v=txmgMZReY80]
*Behaviour in the cleanroom at DTU Nanolab [https://www.youtube.com/watch?v=ROWObpRQFZ8]
*Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [https://www.youtube.com/watch?v=D-0T9X9FFBQ&list=PLjWVU97LayHDKnUd0GrKXdqDhRZuI3iwW]
 
==Labmanager and Labadviser==
*Playlist: DTU Nanolab systems (Labmanager and Labadviser)[https://www.youtube.com/watch?v=jC5soGfyrZc&list=PLjWVU97LayHA_ZKxvmNfTg1Bp53GX07ER]
 
==Wet chemistry==
*Training in fume hoods part 1 - Intro and Getting Started [https://www.youtube.com/watch?v=DRPHtBAqpU0]
*Training in fume hoods part 2 - Working With Acids, Bases and Solvents [https://www.youtube.com/watch?v=sqqktgLklSs]
*Training in fume hoods part 3 – Wet benches and errors [https://www.youtube.com/watch?v=bvK1ONO1lwM]
*Using Quick Dump Rinse Baths [https://www.youtube.com/watch?v=edMt18Uwq9o&list=PLjWVU97LayHCS7pcUsx1qt7vroSdHciXV]
*Native Silicon Dioxide Removal [https://www.youtube.com/watch?v=4JD-fSWlZac]
 
==Lithography==
* Playlist: Lithography TPT - lecture videos [https://www.youtube.com/playlist?list=PLjWVU97LayHCp7x9OujmVlZWLAnK4CDFR]
* Playlist: Lithography TPT - tool training (Spin Coater, Mask Aligner MA6-2, Automatic Puddle Developer) [https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5]
* Playlist: Lithography TPT - tool training (Maskless Aligner) [https://www.youtube.com/watch?v=GyTQNmbev2c&list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV]
 
* E-beam lithography at DTU Nanolab [https://www.youtube.com/watch?v=2bFUO201DS4]
* JEOL 9500 EBL [https://youtu.be/-wZpUNAq8dA?si=UCWm9rL5SoJE9t1I]
 
* Manual Spin Coater: Labspin [https://www.youtube.com/watch?v=_neUkDsQhsM]
* Manual Puddle Developer [https://www.youtube.com/watch?v=btinNzYnLnY&t=2s]
 
==Thin Film deposition and oxidation==
*Playlist: E-beam evaporator (Temescal) [https://www.youtube.com/watch?v=XNvnv4R8a5o&list=PLjWVU97LayHCQWuQyHwddJnpsEYfQp0wf]
*Lesker dual chamber sputter system at DTU Nanolab [https://www.youtube.com/watch?v=1WHv36coRUc]
*Antistiction treatment [https://www.youtube.com/watch?v=5NrPWXVybXg]
* Furnace training: Oxidation furnace [https://www.youtube.com/watch?v=Hi-1zN1RVqc]
 
==Dry Etch==
*Playlist: Dry Etch TPT - Lecture videos [https://www.youtube.com/watch?v=6k6QUyDKQQc&list=PLjWVU97LayHBu0XwMGHss5CdEhka6B72U]
*Playlist: Dry Etch TPT - hands-on videos [https://www.youtube.com/watch?v=ovNM4A4E8Q0&list=PLjWVU97LayHC9cl0cuB65m-FlIScBd5t9]
 
==Characterization==
*Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [https://www.youtube.com/watch?v=JuFZUsbSHvQ&list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj]
*Playlist: AFM Icon Nanoscope software training part I/II/III [https://www.youtube.com/watch?v=i6JXopjBiy4&list=PLjWVU97LayHC9xeoG2uv8IaHuY7t-q0Tj]
*Ellipsometer training [https://www.youtube.com/watch?v=EC-oyRhKr0A]
*Playlist: XPS [https://www.youtube.com/playlist?list=PLjWVU97LayHBtOkPCSv8QA-sD4Dbz1jrb]
 
==Backend tools==
* Disco Dicing saw - blade exchange [https://www.youtube.com/watch?v=0pMraXlfqh8]

Latest revision as of 15:45, 17 June 2025

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Tool Package Training (TPT)

For selected equipment groups, we have created online introductory courses called Tool Package Training (TPT) that provide a comprehensive overview of both the theoretical principles behind the processes and the equipment used. These courses also include video demonstrations showcasing the operation of the equipment available in our cleanroom facilities. The completion of the respective TPTs are mandatory for all academic users before hands-on training on specific equipment can be requested. While we strongly recommend commercial users to take the online courses as well, only the video demonstrations showcasing the operation of the equipment are mandatory.

Course Requirement Description
Lithography TPT for working with Lithography Equipment This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the Lithography TPT and sign up here.
Thin Film TPT for getting access to Thin Film Deposition & Thermal Growth Equipment This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the Thin Film TPT and sign up here.
Dry Etch TPT for getting access to Dry Etch Equipment This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the Dry Etch TPT and sign up here
SEM TPT for getting access to SEMs in 346 and 314/307 This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the SEMs in building 314/307, and 346/347 at DTU Nanolab. Find more information on the SEM TPT and sign up here.



Equipment Tutorials

For selected equipment, we have created online courses called exxplaining the operation (hardware and software) of our equipment. These tutorials are mandatory for all users before hands-on training on specific equipment can be requested via training@nanolab.dtu.dk.

Course Requirement Description
E-beam Lithography for getting access to E-beam Lithography Tools This online tutorial will be part of the E-beam TPT and is currently under prepration. The course is a prerequisite for hands-on training on the electron beam tool. Find more information about the training in the TPT E-beam.
Ellipsometer VASE for getting access to the Ellipsometers This online course consists of two short online tutorials
Atomic Force Microscopy for getting access to the AFM equipment This online course consists of three short training videos regarding equipment operation.
Temescal E-beam evaporator for getting access to the E-beam Evaporators (Temescal) or (10-Pockets) This online course consists of four short training videos regarding equipment operation.
Lesker Dual Chamber Sputter System for getting access to the Sputter-System Metal-Oxide(PC1) Metal-Nitride (PC3) This online course consists of three short training videos regarding equipment operation for PC1 (Oxide) and PC3 (Nitride)).
XPS for getting access to the XPS If you already a user at DTU Nanolab and have access to LabManager, please fill the access request form following the link below:

Else, please contact the Fabrication Support group.

This online course presents the theory behind XPS analysis, as well as training in equipment operation in the cleanroom.

XPS Operation



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