Jump to content

LabAdviser: Difference between revisions

From LabAdviser
← Older edit
VisualWikitext
Mmat (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers, Administrators
1,954 edits
No edit summary
Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,304 edits
No edit summary
 
(131 intermediate revisions by 3 users not shown)
Line 1: Line 1:
__notoc__
__notoc__
[[image:Til LA forside 2024-05-03 161145.png|right|500x500px|thumb|Photos: DTU Nanolab]]
[[image:Til LA forside 2024-05-03 161145.png|right|500x500px|thumb|link=|Photos: DTU Nanolab]]
{{cc-nanolab}}
LabAdviser is a Wiki owned by DTU Nanolab for users of our facilities. It was created with the main purpose of sharing knowledge. It contains information about available equipment and fabrication processes in the cleanroom facilities in building 346/347 and the electron microscopes and supporting tools in 307/314.


LabAdviser is a Wiki designed for users of DTU Nanolab facilities. It contains information about available equipment and fabrication processes in the cleanroom facilities in 346/347 and the characterisation equipment in building 307/314.  
LabAdviser is designed to help you identify the right equipment and provide a solid starting point for your cleanroom processes or for further optimization to meet specific requirements. However, due to ongoing development of tools and processes, some information may be incomplete or not up-to-date. We make every effort to provide reliable information but we provide no warranty as to the accuracy, reliability or completeness of the information found in LabAdviser.  


LabAdviser is meant to help you finding the right equipment and give you a good starting point for your cleanroom process and/or for further optimization to meet your requirements. However, due to continuing development of many processes on many tools, please be aware that not all information for all tools might be available or up-to-date. Labadviser should also not replace communication with Nanolab staff, but we strongly recommend to read information on LabAdviser material as preparation before contacting staff.To fully exploit LabAdviser, you need to log in with your DTU credentials.
Please note that LabAdviser is not a replacement for direct communication with DTU Nanolab staff. We strongly recommend reviewing the information on LabAdviser as preparation before reaching out to staff members.


If in doubt, you are always welcome to contact us via [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk].  
If in doubt, you are always welcome to contact us via [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk].


Any feedback and/or input is welcome to the LabAdviser mailbox: [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk]
[[Image:Virtual tour in the clean room.JPG|right|300px|thumb|link=https://www.nanolab.dtu.dk/capabilities/cleanroom-3d-tour|Click to Enter the Virtual Tour through DTU Nanolabs cleanroom]]
<BR>
<BR>
If you are not a current user you are free to surf around, but please note that note that not all information might be available. You can take a [https://www.nanolab.dtu.dk/capabilities/cleanroom-3d-tour'''Virtual Tour of the DTU Nanolab cleanroom facility'''].
You can explore our [https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ '''YouTube channel'''] with a selection of training videos. <br>


Please also take a look at our homepage [https://www.nanolab.dtu.dk/english '''www.nanolab.dtu.dk'''] for more information.
<BR>Even if you are not a current user at our facilities, you are welcome to surf around. Please note that not all information is available without login. You can take a [https://www.nanolab.dtu.dk/capabilities/cleanroom-3d-tour Virtual Tour of the DTU Nanolab cleanroom facility]. Please also take a look at our homepage [https://www.nanolab.dtu.dk/english www.nanolab.dtu.dk] for more information on how to get access and/or collaborate with us as well as our capabilities and research.  
<BR>
<BR>
LabAdviser contains information about
*Equipment for micro- and nanofabrication available in the Cleanroom Facility (building 346 and 347)
*Equipment for characterization, primarily electron microscopy (building 314 and 307).
*Equipment available in the PolyFabLab and Packlab (346);
*Process Steps in micro- and nanofabrication available in the Cleanroom facility;
*Electron microscopy methods available in building 314/307.
<BR>
== Contents ==
[[Image:Virtual tour in the clean room.JPG|right|300px|thumb|Take a virtual tour in the DTU Nanolab cleanroom [[https://www.nanolab.dtu.dk/capabilities/cleanroom-3d-tour]]]]
[[Image:YouTube.JPG|right|300px|thumb|DTU Nanolab on YouTube [[https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ]]]]


*'''[[/Introduction to LabAdviser and Processing|Introduction to LabAdviser and Micro/Nano Fabrication]]'''
[[Image:YouTube.JPG|right|300px|thumb|link=https://www.youtube.com/@dtunanolab1398|Click to Visit DTU Nanolab on YouTube ]]
*'''[[/Introduction to LabManager|Introduction to LabManager]]'''
*'''[[/Process flow approval|Process flow template & approval]] (fabrication)'''


You are also welcome to explore our [https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ YouTube channel] with a selection of training videos.
<BR><BR><br>
'''LabAdviser contains information about'''
*Equipment available in- and outside of the Cleanroom Facility (building 346)
*Equipment for Characterization, primarily Electron Microscopy (building 314 and 307)
*Equipment available in the PolyFabLab and SupportLab (building 347)
*Processes for Micro- and Nanofabrication available at DTU Nanolab
*Methods in Electron Microscopy available in building 314/307
<br>
<br>
==How Labadviser works==


<!-- *'''[[/CEN|Characterization in building 314/307 - OLD]] -->
Among others information, Labadviser offers users nano- and microfabrication information on how to build up a process flow, f.ex.
*'''[[/314|Characterization in building 314/307]]
how to create a pattern, what materials to use, what process or equipment to use, how to avoid cross contamination between machines, or how to clean samples.
*'''[[Specific Process Knowledge|Micro and Nano Fabrication Overview ]]'''
*'''[[/Courses |Courses (Introduction course, Tool Package Training's (TPT))]]
*'''[[LabAdviser/Technology Research|Some DTU Nanolab Projects - Technology Research]]'''
<!-- *'''[[/Equipment List|Equipment List]]''' -->


The structure of LabAdviser allows users to begin their search either from a known process. For example, if your process involves depositing a gold layer, you would start with the "Thin Film Deposition" section. There, you will find two tables:


*'''[[Surveys and statistics|Surveys, statistics, monthly LabAdviser updates and other info.]]'''
* Overview of '''Materials''', ''such semiconductors, oxides, nitrides, metals, etc.''
*'''[[How to add information to LabAdviser]]'''
* Overview over '''Thin Film Deposition Equipment''', ''such as thermal evaporator, e-beam evaporator, sputter coater, etc.''
<!--
*'''[[/Technology Research|Under Construction]]'''
-->


If you know the material you want to deposit but are unsure which tool to use or how different deposition methods compare, you can select the material (e.g. ''gold''). You will then be directed to a subpage listing all equipment capable of depositing that material and, if available, with some additional material-specific process information. 


<br clear="all" />
Alternatively, if you're more interested in a specific piece of equipment, or wish to explore which materials it can process, selecting that equipment will lead you to a dedicated page with detailed process information, including compatible materials.<BR>
<br>
<br>
==How to add Information to Labadviser==


==Overview of micro and nano fabrication steps - a guide to where you can find fabrication information in LabAdviser==
Sharing knowledge is the key for further development and all our users are encouraged to contribute. In our laboratories thousands of experiments are made. We want to make sure that the knowledge and experience acquired through these become accessible to current and future users. We are interested in any process development being done on our equipment, and even single tests of new recipes can be helpful. For the safety of our users as well as our equipment, we cannot allow LabAdviser to have an open-for-all-input structure like Wikipedia.  
''All drawings in this section done by Jesper Hanberg @DTU Nanolab''
=== Click on [show] and see choices to the right ===
{| style="color: black;vertical-align:top" width="100%" border=0 cellpadding="4" cellspacing="0"
| colspan="2" |
|-
| style="width: 50%; vertical-align:top;"|
{| id="linkTable" border="1" cellpadding="0" cellspacing="0" style="text-align:center;"
! class="hideImage" style="display:none"| Front Image
! style="display:none"|-
! style="display:none"|-
! style="display:none"|-
|-
! class="hideImage" width="150" height="180px"| Clean your sample[[file:jehanClean.png|130px|frameless ]]
! class="hideImage" width="150" | Dry your sample [[file:jehanDry.png|130px|frameless  ]]
! class="hideImage" width="150" | Create a thin film on your sample [[file:jehanfilm.png|130px|frameless  ]]
! class="hideImage" width="150" | Dope your sample [[file:jehanDope.png|130px|frameless ]]
|-
! class="hideImage" width="150" height="180px"| Thermal treatment of your sample [[file:jehanThermal.png|130px|frameless ]]
! class="hideImage" width="150" | Make a mask on your sample[[file:jehanmask.png|130px|frameless ]]
! class="hideImage" width="150" | Transfer pattern to your sample [[file:jehanTransfer.png|130px|frameless ]]
! class="hideImage" width="150" | Define your structure directly [[file:jehandefine.jpg|130px|frameless ]]
|-
! class="hideImage" width="150" height="180px"|  Bond your samples together [[file:jehanBond.png|130px|frameless ]]
! class="hideImage" width="150" | Characterize your sample  [[file:jehanCharacterize.png|130px|frameless ]]
! class="hideImage" width="150" | Pack your sample  [[file:jehanPack.png|130px|frameless ]]
! class="hideImage" width="150" | Process flow examples [[file:processflow_b.png|130px|frameless ]]
|-
|}


| style="color:black; width: 50%; vertical-align: top;"|
We are committed to giving proper credit to all contributors. If you provide material for publication in Labadviser, you will be clearly acknowledged as the author or source. Before publishing your material, we will request your written permission to do so. This ensures transparency and respect for your rights as a creator. More information regarding copyrights can be found [[LabAdviser:Copyright | <b>here</b>]].
{| class="wikitable hideable hidden" border="1" cellspacing="0" cellpadding="0"  align="left" width="400px" style="float:right;"
! style="text-align:right;" | [[image:DUV6.jpg|center|400px|thumb|Photo: DTU Nanolab]]
|-
|}


| style="color:black; width: 50%; vertical-align: top"|
Any feedback or input is welcome and can be send to the LabAdviser mailbox: [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk].
{| class="wikitable hideable hidden" border="1" cellspacing="0" cellpadding="0"  align="left" width="430px"
<br>
! colspan="3" style="text-align:left;" | [[image:Clean your sample.png|x100px|Clean your sample]] Clean your sample
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="5" valign="top" |[[Specific Process Knowledge/Wafer cleaning|Wafer cleaning]]
|Soap Sonic
|Removes dust and particles
|-
|7-up & Piranha
|Removes traces of organics and alkali ions
|-
|RCA
|Two step process to remove traces of organics and metals
|-
|5% HF
|Removes native oxide
|-
|IMEC
|Removing dust, traces of organics and alkali ions and slightly polish the surface.
Make the surface hydrophillic
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
!colspan="3" style="text-align:left;" | [[image:Dry your sample.png|x130px|Dry your sample]] Dry your sample
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="4" valign="top" |[[Specific Process Knowledge/Wafer and sample drying|Wafer and sample drying]]
|Spin dryers
|Whole wafers
|-
|Critial point dryer
|Sensitive wafers
|-
|Ethanol fume drying
|Sensitive wafers
|-
|N2 blow drying
|N2 pistols
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="600px"
!colspan="3" style="text-align:left;" | [[image:Create a film on your sample.png|x100px|Create a layer/film on your sample]] Create a layer/film on your sample
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|[[Specific Process Knowledge/Thermal Process/Oxidation| Thermal Process/Oxidation]]
|Thermal oxidation
|Thermal SiO2
|-
|rowspan="8" valign="top"|[[Specific Process Knowledge/Thin film deposition| Thin film deposition]]
|Sputter deposition
|Metals: Al, Ti, Cr, Co, Ni, Cu, Mo, Pd, Ag, Sn, Ta, W, Pt, Au, Fe, Mg, Nb, Ru <br>
Semiconductors: Si, Ge, ZnO <br>
Oxides: SiO<sub>2</sub>, ITO, TiO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub>, MgO, Ta<sub>2</sub>O<sub>5</sub> Cr<sub>2</sub>O<sub>3</sub><br>
Transparent Conducting Oxides: ITO, AZO<br>
Alloys: TiW, NiCr, AlTi, NiV, AlCu, CoFe, CuTi, FeMn, MnIr, NiCo, NiFe, YSZ <br>
|-
|Thermal evaporation
|Al, Ge, Ag
|-
|E-beam evaporation
|Metals: Ti, Cr, Al, Ni, Pt, Au, Mo, Nb, Pd, Ag, Cu, W, Ta <br>
Semiconductors: Si, Ge <br>
Oxides: SiO<sub>2</sub>, TiO<sub>2</sub> <br>
Alloys: NiCr, TiAl
|-
|LPCVD
|Si<sub>3</sub>N<sub>4</sub>, SRN, SiO<sub>2</sub>, Si (poly and amorph)
|-
|PECVD
|Si<sub>3</sub>N<sub>4</sub>, SiO<sub>2</sub>, PBSG
|-
|MVD
|FDTS
|-
|Electroplating
|Ni
|-
|Epitaxial growth /MOCVD
|Al, As, Ga, In, P. doping: Si, Zn
|-
|rowspan="2" valign="top"| [[Specific Process Knowledge/Lithography/Coaters|Lithography/Coaters]]
|Spin coating
|resists, polymers
|-
|Spray coating
|resists, polymers
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
!colspan="3" style="text-align:left;" | [[image:Dope your sample.png|x100px|Dope your sample]] Dope your sample
|-
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="5" valign="top"| [[Specific Process Knowledge/Doping|Doping]]
|Ion implant
|e.g. P, B, As 
|-
|[[Specific Process Knowledge/Thin film deposition/PECVD| PECVD]]
|Deposition of SiO2 or Si3N4 doped with P,B and Ge
|-
|[[Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon|LPCVD ]]
|Deposition of PolySi doped with B or P
|-
|[[Specific Process Knowledge/Thermal Process/Dope with Boron|Predeposition and drive-in]]
|Doping Silicon wafers with boron
|-
|[[Specific Process Knowledge/Thermal Process/Dope with Phosphorus|Predeposition and drive-in]]
|Doping Silicon wafers with phosphorus
 
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
!colspan="3" style="text-align:left;" | [[image:Thermal treat your sample.png|x100px|Thermal treatment of your sample]] Thermal treatment of your sample
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="5" valign="top"|[[Specific Process Knowledge/Thermal Process|Thermal Process]]
|Annealing (>350C)
|Si, PECVD layers, Al, BCB curing, Polymer
|-
|Oxidation
|Si wafers
|-
|Doping with B/P
|Si wafers
|-
|Pyrolysis
|Resists: AZ, SU8, PDMS
|-
|Rapid Thermal Anneal (RTP)
|SiO2, Si3N4, Ti, III-V
|-
|
[[Specific Process Knowledge/Lithography/Baking| Lithography/Baking]] <br>
|Baking (<300dg)
|baking resist and polymers
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
!colspan="3" style="text-align:left;" | [[image:Make a mask on your sample.png|x100px|Make a mask on your sample]] Make a mask on your sample
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="5" valign="top"|[[Specific Process Knowledge/Lithography| Lithography]]
|Pattern design & Mask fabrication
|
|-
|Photolithography
|UV resists
|-
|Deep UV lithography
|DUV resists
|-
|E-beam lithography
|E-beam resists
|-
|Imprinting
|Polymers
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
!colspan="3" style="text-align:left;" | [[image:Transfer mask pattrn to your sample.png|x100px|Transfer mask pattern to your sample]] Transfer mask pattern to your sample
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="2" valign="top"|[[Specific Process Knowledge/Etch| Etch]]
|Wet etch
|Si, Glass, SiO2, Si3N4, Al, Cr, Ti, Au, Pt, InP, InGaAsP, GaAs/AlGaAs
|-
|Dry etch
|Any material
|-
|[[Specific Process Knowledge/Lithography/LiftOff| Lithography/Lift-off]]
|Lift-off
|Most materials
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
!colspan="3" style="text-align:left;" | [[image:Define your structure directly.png|x100px|Define the structure directly on your sample]] Define your structure directly
|-
!Entry page in LabAdviser
!Techniques
!Materials
|-
|rowspan="5" valign="top"|[[Specific Process Knowledge/Direct Structure Definition|Direct Structure Definition]]
|Polymer Injection molding
|Topas, PP, PE, PS
|-
|LASER micro machining
|Silicon, Metal, Graphene (on silicon), Glass (Pyrex, fused silica), TOPAS, PMMA
|-
|Dicing saw
|Silicon, Glass (Pyrex, fused silica)
|-
|[[Specific Process Knowledge/Imprinting|Imprinting]]
|TOPAS, PMMA
|-
|Hot Embosser
|Topas, PP, PE, PS, PC, PMMA, ...
|-
|[[Specific Process Knowledge/Lithography|Lithography definition]]
|SU8, AZ resists
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
!colspan="3" style="text-align:left;" | [[image:Bond your samples together.png|x100px|Bond your samples together]] Bond your samples together
|-
!Entry page in LabAdviser
!Techniques
|-
|rowspan="3" valign="top"|[[Specific Process Knowledge/Bonding|Bonding]]
|Eutectic bonding
|-
|Fusion bonding
|-
|Anodic bonding
|-
|[[Specific_Process_Knowledge/Etch/DryEtchProcessing/Bonding |Etch/DryEtchProcessing/Bonding]]
|Temporary bonding of wafers or chips for dry etching
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
!colspan="3" style="text-align:left;" | [[image:Characterize your sample.png|x100px|Characterize your sample]] Characterize your sample
|-
!Entry page in LabAdviser
!What do you need to measure?
!Technique/Method
|-
|rowspan="12" valign="top"|[[Specific Process Knowledge/Characterization|Characterization]]
|Sample Imaging, XY dimensions
|Microscopy: optical, SEM, AFM
|-
|Sample Topography
|AFM, Profiling with stylus or optical
|-
|Film thickness and optical constants
|Ellipsometry, Reflectometry, Prism Coupling
|-
|Film Stress
|Profiling with stylus or optical
|-
|Wafer thickness
|Micrometer gauge
|-
|Element analysis
|XPS, EDX, SIMS
|-
|Contact Angle
|Drop shape analyzing
|-
|Resistivity
|Four point probe, Probe station
|-
|Doping level/Carrier density
|ECV (Electrochemical Capacitance-Voltage) -profiler
|-
|Direct Bandgap
|Photoluminescence
|-
|Lattice mismatch
|X-ray diffractometer
|-
|Defects/contamination
|Particle/defect counter
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
!colspan="3" style="text-align:left;" | [[image:Pack your sample (back-end).png|x100px|Pack your sample (back-end)]] Pack your sample (back-end)
|-
!Entry page in LabAdviser
!Techniques
|-
|rowspan="3" valign="top"|[[Specific Process Knowledge/Back-end processing|Back-end processing]]
|Chip/die mounting
|-
|Wire bonding
|-
|Dicing
|-
|}
{| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2"  align="left" width="430px"
!colspan="3" style="text-align:left;" | Process flow examples
|-
!Entry page in LabAdviser
!Topic
|-
|[[LabAdviser/Introduction_to_LabAdviser_and_Processing|Introduction to LabAdviser and Processing]]
|Solar cell flow
|-
|[[Process_flow_approval|Process flow approval]]
|Info on process flow review
|-
|[[Specific Process Knowledge/Lithography/UVLithography#Resist Overview|UV Lithography#Resist Overview]]
|UV Lithography flows
|-
|[[Specific Process Knowledge/Lithography/EBeamLithography#E-beam resists and Process Flows|EBeamLithography#E-beam resists and Process Flows]]
|E-beam lithography flows
|-
|}
 
|-
|}
 
----
<br>
<br>


== Contact Information for the DTU Nanolab fabrication part ==
== Surveys and Statistics ==
'''Surveys'''


<!--Originally a template was used to call on the contact information:
DTU Nanolab performs regular customer surveys which are available on LabManager. ''Access to LabManager requires a DTU account and access to DTU Nanolab facilities.''
{{DanchipInfo}}
This template has the address:
http://labadviser.nanolab.dtu.dk/index.php/Template:DanchipInfo -->


In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab.<br />
[https://labmanager.dtu.dk/function.php?module=CustomerSurvey&view=show&scope_id=2 Bld.314/307]
<BR>
[https://labmanager.dtu.dk/function.php?module=CustomerSurvey&view=show&scope_id=1 Bld.346/347]


{| border="2" cellspacing="0" cellpadding="10" align="left"
|-
| style="background:silver; color:black" | '''Subject'''
| align="center" style="background:silver; color:black" | '''Email'''
| align="center" style="background:silver; color:black" | '''Description'''
|-


|-
'''Tech Forum slides'''
| style="background:WhiteSmoke; color:black" | '''Training and Process Flow'''
| align="center" style="background:WhiteSmoke; color:black" | [mailto:training@nanolab.dtu.dk?Subject=⟨user%20name⟩%20⟨subject⟩ training@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" | All requests regarding equipment training and process flows. Please add your Name to the subject line.<BR><BR> <i>Note: Requests are commonly answered within 2 workdays. </i>
|-


|-
The purpose of the Nanolab Technology Forum is to discuss the current and future technological possibilities at Nanolab, including user requirements, current equipment status, equipment acquisition, funding, etc.
| style="background: LightGrey; color:black" | '''E-beam training'''
<!--If you wish to receive the meeting invitation, please sign up beneath.  
| align="center" style="background: LightGrey; color:black"  | [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk]
!-->
| style="background: LightGrey; color:black" | Requests regarding training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on [[Specific Process Knowledge/Lithography/EBeamLithography|the EBL Labadviser pages]] beforehand.
|-


|-
Tech Forum slides are available on LabManager. ''Access to LabManager requires a DTU account and access to DTU Nanolab facilities.''
| style="background:WhiteSmoke; color:black" | '''E-beam Cassette loading'''
| align="center" style="background:WhiteSmoke; color:black" |  [mailto:e-beamload@nanolab.dtu.dk e-beamload@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" | Requests regarding cassette loading on JEOL JBX-9500FSZ.
|-


|-
[https://labmanager.dtu.dk/function.php?module=PeriodicDocument&view=docs&page_id=397 Tech Forum Slides]
| style="background: LightGrey; color:black" |  '''General inquiries'''
<br>
| align="center" style="background: LightGrey; color:black"  | [mailto:nanolabsupport@nanolab.dtu.dk?subject=⟨user%20name⟩%20⟨subject⟩ nanolabsupport@nanolab.dtu.dk]
| style="background: LightGrey; color:black"  | Inquiries related to machines, cleanroom access, Mask review, tool changes, and others.  Please add your Name to the subject line. <BR><BR> <i>Note: Requests are commonly answered within 2 workdays. </i>
|-
 
|-
| style="background:WhiteSmoke; color:black" | '''Metal Wishes'''
| align="center" style="background:WhiteSmoke; color:black" |  [mailto:metal@nanolab.dtu.dk metal@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black"  | Requests for change of metal in Thin Film Deposition equipment. <BR> See current and future materials in statuslog of the respective machines.
 
<BR>
[http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=244&type=status Lesker - status log]
<BR>
[http://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=429&type=status E-Beam Evaporator (Temescal) - status log]
<BR>
[https://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=511&type=status E-Beam Evaporator (10-pockets) - status log]
<BR>
[https://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=441&type=status Sputter-System Metal-Oxide(PC1) - status log]
<BR>
[https://labmanager.dtu.dk/function.php?module=Machine&view=log&mach=442&type=status Sputter-System Metal-Nitride(PC3) - logbook]
<BR><BR> <i>For requests regarding Wordentec, please contact the Thin Film group directly.</i>
|-
 
|-
| style="background: LightGrey; color:black" |  '''Gas-related Requests'''
| align="center" style="background: LightGrey; color:black" |    [mailto:DCH-Gas@nanolab.dtu.dk DCH-Gas@nanolab.dtu.dk]
| style="background: LightGrey; color:black" |    All topics gas-related (issues, information regarding ordering, delivery, changing etc). Mostly for internal DTU Nanolab use.
|-
 
 
|-
| style="background:WhiteSmoke; color:black" |  '''LabAdviser Mailbox'''
| align="center" style="background:WhiteSmoke; color:black" | [mailto:labadviser@nanolab.dtu.dk?Subject=Feedback%20to%20Labadviser labadviser@nanolab.dtu.dk]
| style="background:WhiteSmoke; color:black" | Any questions or feedback to LabAdviser.
|-
 
|-
| style="background: LightGrey; color:black" |  '''Commercial Inquiries'''
| align="center" style="background: LightGrey; color:black" |  [mailto:sales@nanolab.dtu.dk sales@nanolab.dtu.dk]
| style="background: LightGrey; color:black" |  For all inquiries regarding in-sourcing, commercial applications, rent of cleanroom space, etc
|-
|}
<br clear="all"/>
<br>
<br>
==DTU Nanolab Fabrication Cleanroom Naming and Phone Numbers==
===Cleanroom building 346 ground floor===
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 50%"|
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 40%"|
[[image:Cleanroom_naming_2017.jpg|500px|thumb|Drawing: DTU CAS Digital]]
|}
| style="width: 50%"|
{|border="1" cellspacing="1" cellpadding="1" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!Room number
!Where in the room
!Phone number
|-
|-
|-style="background:WhiteSmoke; color:black"
!A-1
|At III-V RIE
|55 804
|-
|-
|-style="background:LightGrey; color:black"
!Ax2
|At the Lesker
|55 815
|-
|-
|-style="background:WhiteSmoke; color:black"
!A-5
|In the corner near the furnace/plasma asher
|55 803
|-
|-
|-style="background:LightGrey; color:black"
!B-1
|In the corridor
|55 806
|-
|-
|-style="background:WhiteSmoke; color:black"
!C-1
|At the corridor
|55 808
|-
|-
|-style="background:LightGrey; color:black"
!D-1
|The entrance room
|55 703
|-
|-
|-style="background:WhiteSmoke; color:black"
!D-3
|At the KOH
|55 940
|-
|-
|-style="background:LightGrey; color:black"
!E-1
|By the e-beam computers
|55 943
|-
|-
|-style="background:WhiteSmoke; color:black"
!E-5/E-4
|By the MLAs in E-5, by mask aligner in E-4
|55 946
|-
|-
|-style="background:LightGrey; color:black"
!E-6
|Furnace 6"
|55 948
|-
|-
|-style="background:WhiteSmoke; color:black"
!F-1
|III-V growth
|55 949
|-
|-
|-style="background:LightGrey; color:black"
!F-2
|To the right of the XRD and Ellipsometer
|55 941
|-
|-
|-style="background:WhiteSmoke; color:black"
!F-3
|DUV Stepper
|55 947
|-
|-
|-style="background:LightGrey; color:black"
!Basement 901
|Injection molder room in the basement
|55 812
|-
|-style="background:LightGrey; color:black"
!Basement 904
|To the right of the AFM
|55 813
|-
|}
|}
<br clear="all" />
===Basement building 346 phase 1===
[[File:Basement 346 phase 1.jpg|left|600px|thumb|Drawing: DTU CAS Digital]] <br>
<br clear="all" />
==DTU Nanolab building 314 and Phone Numbers==
{| style="color: black;" width="100%"; "text-align: center
| colspan="2" |
|-
| style="width: 50%"|
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 40%"|
[[File:CEN building.jpg|600px|left|thumb|Drawing: DTU CAS Digital]]
|}
| style="width: 50%"|
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 50%"|
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 40%"|
|}
| style="width: 50%"|
{|border="1" cellspacing="1" cellpadding="1" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!Room number
!Description
!Phone number
|-
|-
|-style="background:WhiteSmoke; color:black"
!314-011
|QFEG 200 Cryo ESEM
|56 406
|-
|-
|-style="background:LightGrey; color:black"
!314-014
|Tecnai T20
|56 407
|-
|-
|-style="background:WhiteSmoke; color:black"
!314-032
|Prep room 1
|No phone
|-
|-
|-style="background:LightGrey; color:black"
!314-034
|AFEG 250 ESEM
|56 414
|-
|-
|-style="background:WhiteSmoke; color:black"
!314-037
|Titan ETEM
|56 418
|-
|-
|-style="background:LightGrey; color:black"
!314-040
|Prep room 2 (Bio)
|56 413
|-
|-
|-style="background:WhiteSmoke; color:black"
!314-042
|Titan ATEM
|56 409
|-
|-
|-style="background:LightGrey; color:black"
!314-060
|Nova NanoSEM 600
|56 412
|-
|-
|-style="background:WhiteSmoke; color:black"
!314-061
|Helios Nanolab
|56 411
|-
|}
|}
<br clear="all" />

Latest revision as of 11:33, 29 September 2025

Photos: DTU Nanolab

LabAdviser is a Wiki owned by DTU Nanolab for users of our facilities. It was created with the main purpose of sharing knowledge. It contains information about available equipment and fabrication processes in the cleanroom facilities in building 346/347 and the electron microscopes and supporting tools in 307/314.

LabAdviser is designed to help you identify the right equipment and provide a solid starting point for your cleanroom processes or for further optimization to meet specific requirements. However, due to ongoing development of tools and processes, some information may be incomplete or not up-to-date. We make every effort to provide reliable information but we provide no warranty as to the accuracy, reliability or completeness of the information found in LabAdviser.

Please note that LabAdviser is not a replacement for direct communication with DTU Nanolab staff. We strongly recommend reviewing the information on LabAdviser as preparation before reaching out to staff members.

If in doubt, you are always welcome to contact us via nanolabsupport@nanolab.dtu.dk.

Click to Enter the Virtual Tour through DTU Nanolabs cleanroom


Even if you are not a current user at our facilities, you are welcome to surf around. Please note that not all information is available without login. You can take a Virtual Tour of the DTU Nanolab cleanroom facility. Please also take a look at our homepage www.nanolab.dtu.dk for more information on how to get access and/or collaborate with us as well as our capabilities and research.

Click to Visit DTU Nanolab on YouTube

You are also welcome to explore our YouTube channel with a selection of training videos.


LabAdviser contains information about

  • Equipment available in- and outside of the Cleanroom Facility (building 346)
  • Equipment for Characterization, primarily Electron Microscopy (building 314 and 307)
  • Equipment available in the PolyFabLab and SupportLab (building 347)
  • Processes for Micro- and Nanofabrication available at DTU Nanolab
  • Methods in Electron Microscopy available in building 314/307



How Labadviser works

Among others information, Labadviser offers users nano- and microfabrication information on how to build up a process flow, f.ex. how to create a pattern, what materials to use, what process or equipment to use, how to avoid cross contamination between machines, or how to clean samples.

The structure of LabAdviser allows users to begin their search either from a known process. For example, if your process involves depositing a gold layer, you would start with the "Thin Film Deposition" section. There, you will find two tables:

  • Overview of Materials, such semiconductors, oxides, nitrides, metals, etc.
  • Overview over Thin Film Deposition Equipment, such as thermal evaporator, e-beam evaporator, sputter coater, etc.

If you know the material you want to deposit but are unsure which tool to use or how different deposition methods compare, you can select the material (e.g. gold). You will then be directed to a subpage listing all equipment capable of depositing that material and, if available, with some additional material-specific process information.

Alternatively, if you're more interested in a specific piece of equipment, or wish to explore which materials it can process, selecting that equipment will lead you to a dedicated page with detailed process information, including compatible materials.


How to add Information to Labadviser

Sharing knowledge is the key for further development and all our users are encouraged to contribute. In our laboratories thousands of experiments are made. We want to make sure that the knowledge and experience acquired through these become accessible to current and future users. We are interested in any process development being done on our equipment, and even single tests of new recipes can be helpful. For the safety of our users as well as our equipment, we cannot allow LabAdviser to have an open-for-all-input structure like Wikipedia.

We are committed to giving proper credit to all contributors. If you provide material for publication in Labadviser, you will be clearly acknowledged as the author or source. Before publishing your material, we will request your written permission to do so. This ensures transparency and respect for your rights as a creator. More information regarding copyrights can be found here.

Any feedback or input is welcome and can be send to the LabAdviser mailbox: labadviser@nanolab.dtu.dk.

Surveys and Statistics

Surveys

DTU Nanolab performs regular customer surveys which are available on LabManager. Access to LabManager requires a DTU account and access to DTU Nanolab facilities.

Bld.314/307
Bld.346/347


Tech Forum slides

The purpose of the Nanolab Technology Forum is to discuss the current and future technological possibilities at Nanolab, including user requirements, current equipment status, equipment acquisition, funding, etc.

Tech Forum slides are available on LabManager. Access to LabManager requires a DTU account and access to DTU Nanolab facilities.

Tech Forum Slides

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=LabAdviser&oldid=54739"