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== Thin Film Tool Package Training ==
== Thin Film Tool Package Training ==


DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.  
DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].
 
<BR>
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.
<BR>
 
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here].
<BR>
<BR>
'''Course Layout'''
'''Course Layout'''
# Online lecture videos (theory)
# Online lecture videos (theory)
# Quizzes for each section
# Quizzes for each section
# Individual hands-on training (specific equipment)
# Individual hands-on training (specific equipment)
 
<BR>
''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
 
<BR>
<BR>
'''Learning objectives'''   
'''Learning objectives'''   
''Learn about the fundamentals of lithography processing in a cleanroom.''
<BR>
* Understand different film deposition methods
* Understand different film deposition methods
* Learn different thin film formation mechanisms
* Learn different thin film formation mechanisms
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* compare and be able to understand appropriate thin film techniques
* compare and be able to understand appropriate thin film techniques
* introduction to equipment at DTU Nanolab  
* introduction to equipment at DTU Nanolab  
 
<BR>
Course Contents
'''Course Contents'''
<BR>
* Introduction to Thin Film Techniques  
* Introduction to Thin Film Techniques  
** Thin Film Formation
** ''Thin Film Formation''
** Material Properties
** ''Material Properties''
** Overview over Thin Film Techniques
** ''Overview over Thin Film Techniques''
* Physical Vapour Deposition (PVD)
* Physical Vapour Deposition (PVD)
** ''Introduction to PVD''
** ''Introduction to PVD''
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* Chemical Vapor Deposition (CVD)
* Chemical Vapor Deposition (CVD)
* Atomic Layer Deposition (ALD)
* Atomic Layer Deposition (ALD)
 
<BR>
Qualifying Prerequisites
'''Qualifying Prerequisites'''
 
<BR>
Cleanroom safety course at DTU Nanolab
* Cleanroom safety course at DTU Nanolab
Admission to the cleanroom must be obtained before the group training session
* Admission to the cleanroom must be obtained before the group training session
 
<BR>
Course Responsible
'''Course Responsible'''
* Pernille Voss Larsen
* Pernille Voss Larsen
* Evgeniy Shkondin
* Evgeniy Shkondin
 
<BR>
If you have questions you can contact us via lithography@nanolab.dtu.dk.
If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk thinfilm@nanolab.dtu.dk].  
 
 
 
 
 
 
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
|-
|-
|-style="background:White; color:black; text-align:center"
!colspan="2"|Thin film tool package training (TPT)
|-
 
|-
!Schedule
|
===<b>Theoretical part</b>===
<br> 
 
'''1<sup>st</sup> lecture (2 - 2½ hours):'''
 
*Introduction to thin films
**Thin film formation
**Material properties
**Overview of the techniques
**LabAdviser
*PVD (physical Vapour Deposition)
**General notes on PVD
**Resistive thermal evaporation
**E-beam Evaporation
**Sputtering
<!--
*Introduction to thin films
*Before you start - Material properties to consider
*Overview of thin film techniques at DTU Nanolab
*Equipment overview in LabAdviser
*Thin film techniques – 1<sup>st</sup> part:
**Thermal oxidation
-->
 
<i>
The next lecture will be held on the 17th of April 2024 from 10-12 The lecture will be held in room 011 in building 451.
 
Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.
 
In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”. 
 
You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture.
 
Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
 
<!--https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.
 
If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk.--> 
 
<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
 
'''2<sup>nd</sup> lecture (3 - 3½ hours):'''
 
*Thermal Oxidation
*CVD (Chemical Vapour Deposition): 
**LPCVD (Low Pressure Chemical Vapour Deposition)
**PECVD (Plasma Enhanced Chemical Vapour Deposition)
*ALD (Atomic Layer Deposition)
**Thermal ALD
**Plasma Enhanced ALD
*Comparison of thin film techniques
<!--
*Thin film techniques – 2<sup>nd</sup>  part:
**PVD (physical vapour deposition)
***E-beam evaporation
***Thermal evaporation
***Sputtering
**CVD (chemical vapour depostion)
***LPCVD (low pressure chemical vapour deposition)
***PECVD (plasma enhanced chemical vapour deposition)
**ALD (atomic layer deposition)
-->
 
<i>The next lecture will be held on the 19th of April 2024 from 9-12. The lecture will be held in room 043 in building 345B.
 
Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.
 
In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”.
 
You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture.
 
Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
 
<!-- Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
 
If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
 
===<b>Practical part</b>===
* None
|-
 
|-
!Location
|
'''Theoretical part'''
 
The locations for the lectures will be notified in the Doodles
 
|-
 
|-
!Qualified prerequisites
|
None
|-
 
|-
!Preparations
|
No preparation is required.
 
However, a good overview of thin film processes can be found in [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (requires login).
 
Links to more literature about thin films can be found below.
|-
 
|-
!Course responsible
|
The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
|-
 
|-
!Learning goals
|
*Be aware of relevant material properties for thin films made in the cleanroom
*Understand different thin film techniques
*Compare and be able to select appropriate thin film technique
 
|-
|}
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==Presentations from the lectures==
==Knowledge and Information about Thin Film Techniques==
 
<big>Slides from the 1<sup>st</sup> lecture</big>
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)]
<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]-->
 
<big>Slides from the 2<sup>nd</sup> lecture</big>
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)].
<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]-->
 
==Literature==


Some literature about thin films can be found here (requires a login):
====Introduction to Thin Films====
 
====Introduction to thin films====
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
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*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]


====Stress in thin films====
====Stress in Thin Films====
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements]
*[https://www.bruker.com/en/meta/fileadmin/_jcr_content/root/contentpar/search.download-asset.pdf/2bbdadb5-98f9-4b72-9ad4-cfb3683fb2da/thin-film-stress-measurement-using-dektak-stylus-profilers-app-note-BRUKER.pdf Dektak stress measurements]
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