LabAdviser/Courses/TPT Dry Etch: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Dry_Etch click here]''' | ||
==Dry Etch Tool Package Training== | ==Dry Etch Tool Package Training== | ||
DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | DTU Nanolab offers a Tool Package Training for Dry Etching (TPT Dry Etch). The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's. The course includes theory on dry etch processes and training videos for equipment operation. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you are invited to an Question & Evaluation session to shortly discuss your results and plan the group hands-on session. Those session are used to demonstrate the available dry etch equipment and their respective operational interface (software). Afterwards, you can request individual hands-on training for the equipment you would like to use via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | ||
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The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here]. | The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here]. | ||
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*Lecture powerpoint slide show [[:File:TPT Dry etching April2018.pptx]] | *Lecture powerpoint slide show [[:File:TPT Dry etching April2018.pptx]] | ||
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*Lecture slides with explanatory text included [https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=7&name=Lecture+Power+point+with+notes+dec+2020.pdf] | *Lecture slides with explanatory text included [https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=7&name=Lecture+Power+point+with+notes+dec+2020.pdf] ''(login required)'' | ||
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