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Specific Process Knowledge/Lithography/Coaters/labspin: Difference between revisions

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Line 94: Line 94:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!HSQ/AR-N 8200
!HSQ/AR-N 8200
|MIBK/PGMEA
|MIBK/PGME/n-Butyl acetate
|Acetone
|Acetone
|
|
HSQ (FOx series)<br>
HSQ (FOx series)<br>
AR-N 8200
AR-N 8200<br>
AR-N 8400
|
|
|-
|-
Line 144: Line 145:
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!Epoxy/Acrylate
!Epoxy/Acrylate
|Cyclopentanone/PGMEA
|Cyclopentanone/PGMEA/PGME/GBL
|Acetone
|Acetone
|
|
SU-8 2000 series<br>
SU-8 3000 series<br>
SU-8 series<br>
mr-DWL<br>
mr-DWL<br>
LOR (1A, 3A, 5A)<br>
LOR (1A, 3A, 5A)<br>
Line 162: Line 164:
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!AR-P 617/AR-N 7520
!AR-P 617/AR-N 7520 New
|PGME/PGMEA
|PGME/PGMEA
|Acetone
|Acetone
Line 202: Line 204:
Please do NOT use substances which is not for the dedicated bowlsets  
Please do NOT use substances which is not for the dedicated bowlsets  
|-
|-
|style="background:LightGrey; color:black"|All purpose
|style="background:LightGrey; color:black"|Dirty bowlset
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
Spin coating of dirty substances in '''All purpose'''
Spin coating of other substances in dirty bowlset
<br>
<br>


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