Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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|style="background:Silver; color:black"|Thermocouple Control | |style="background:Silver; color:black"|Thermocouple Control | ||
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* RT to | * RT to 1000 <sup>o</sup>C | ||
|style="background:WhiteSmoke; color:black;" align="left"|Recommended '''up to 800 <sup>o</sup>C''', if '''forming gas''' is used. | |style="background:WhiteSmoke; color:black;" align="left"|Recommended '''up to 800 <sup>o</sup>C''', if '''forming gas''' is used. | ||
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