Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace/Acceptance test: Difference between revisions
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''This page is written by DTU Nanolab internal'' | ''This page is written by DTU Nanolab internal'' | ||
== | ==Multipurpose Anneal furnace acceptance test== | ||
The acceptance for the | The acceptance for the Multipurpose Anneal furnace was performed in January 2015 by ATV Technologie and DTU Nanolab. | ||
At the acceptance test a dry oxide layer was grown on a boat of 150 mm wafers. The oxide growth was repeated three times | At the acceptance test a dry oxide layer was grown on a boat of 150 mm wafers. The oxide growth was repeated three times. | ||
For each run the oxide thickness and refractive index were measured on three of the wafers, and the standard deviation and non-uniformity were calculated for each wafer, over the boat and from run to run. | For each run the oxide thickness and refractive index were measured on three of the wafers, and the standard deviation and non-uniformity were calculated for each wafer, over the boat and from run to run. The results can be found below. | ||
In November 2024 the furnace was repaired by ATV Technologie. At the repair, the whole furnace body was changed, and all heaters were replaced. Also, the process exhaust flow was decreased by changing a valve in the exhaust line. | |||
After the repair, the oxidation process from the acceptance test was repeated and optimized. The positions of the control thermocouples (TCs) and the process exhaust were adjusted to minimize the non-uniformity of the grown oxide layer. The final optimized result can be found below. | |||
==Oxidation parameters== | ==Oxidation parameters== | ||
'''Recipe''': " | '''Recipe''': "vr_dryOx_1050C_80min_150_5Wafer_D1_mit_Inliner_oPurgering.ATV" or ""vr_dryOx_1050C_80min_3Wafer_June2020.ATV" (same recipe parameters) | ||
'''Oxidation time''': 80 min | '''Oxidation time''': 80 min | ||
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The oxidation has been done with 150 mm wafers. The number of wafers in the boat was 30. | The oxidation has been done with 150 mm wafers. The number of wafers in the boat was 30. | ||
Wafer 4 (towards the door), wafer 16 and wafer 28 (towards the service area) were measured in 13 points using the M-2000V ellipsometer. | Wafer 4 (towards the door), wafer 16 (center wafer) and wafer 28 (towards the service area) were measured in 13 points using the M-2000V ellipsometer. | ||
==Results== | ==Results - Acceptance test 2014== | ||
====Oxide thickness==== | ====Oxide thickness==== | ||
{| border="2" cellpadding="2" cellspacing=" | {| border="2" cellpadding="2" cellspacing="2" style="text-align:center;" | ||
|- | |- | ||
! | ! | ||
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| 0.1637 | | 0.1637 | ||
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==Results - Furnace repair 2024== | |||
====Oxide thickness==== | |||
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" | |||
|- | |||
! | |||
! Date | |||
! colspan="2" | Wafer 4 | |||
! colspan="2" | Wafer 16 | |||
! colspan="2" | Wafer 28 | |||
! colspan="2" | Over the boat (all points) | |||
! colspan="2" | Center point only | |||
|- | |||
! width="80" | | |||
! width="80" | | |||
! width="70" | Average oxide thickness [nm] | |||
! width="70" | Non-uniformity [%] | |||
! width="70" | Average oxide thickness [nm] | |||
! width="70" | Non-uniformity [%] | |||
! width="70" | Average oxide thickness [nm] | |||
! width="70" | Non-uniformity [%] | |||
! width="70" | Average oxide thickness [nm] | |||
! width="70" | Non-uniformity [%] | |||
! width="70" | Average oxide thickness [nm] | |||
! width="70" | Non-uniformity [%] | |||
|- | |||
! Test | |||
| 07-05-2024 | |||
| 108.1 | |||
| 0.96 | |||
| 108.7 | |||
| 0.95 | |||
| 109.8 | |||
| 0.98 | |||
| 108.9 | |||
| 0.76 | |||
| 108.2 | |||
| 1.22 | |||
|- | |||
|} | |||
Thermo couple (TC) position - Distance from the bell jar: 12 cm, 21.5 cm, 36 m | |||