Specific Process Knowledge/Lithography/Coaters/labspin: Difference between revisions
| (4 intermediate revisions by 3 users not shown) | |||
| Line 66: | Line 66: | ||
AZ MiR 701<br> | AZ MiR 701<br> | ||
AZ nLOF 2000 series<br> | AZ nLOF 2000 series<br> | ||
mr-I8100R | mr-I8100R<br> | ||
AZ 15nXT | |||
|Two bowlsets available | |Two bowlsets available | ||
|- | |- | ||
| Line 93: | Line 94: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!HSQ/AR-N 8200 | !HSQ/AR-N 8200 | ||
|MIBK/ | |MIBK/PGME/n-Butyl acetate | ||
|Acetone | |Acetone | ||
| | | | ||
HSQ (FOx series)<br> | HSQ (FOx series)<br> | ||
AR-N 8200 | AR-N 8200<br> | ||
AR-N 8400 | |||
| | | | ||
|- | |- | ||
| Line 143: | Line 145: | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!Epoxy/Acrylate | !Epoxy/Acrylate | ||
|Cyclopentanone/PGMEA | |Cyclopentanone/PGMEA/PGME/GBL | ||
|Acetone | |Acetone | ||
| | | | ||
SU-8 | SU-8 3000 series<br> | ||
SU-8 series<br> | |||
mr-DWL<br> | mr-DWL<br> | ||
LOR (1A, 3A, 5A)<br> | LOR (1A, 3A, 5A)<br> | ||
| Line 161: | Line 164: | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!AR-P 617/AR-N 7520 | !AR-P 617/AR-N 7520 New | ||
|PGME/PGMEA | |PGME/PGMEA | ||
|Acetone | |Acetone | ||
| Line 201: | Line 204: | ||
Please do NOT use substances which is not for the dedicated bowlsets | Please do NOT use substances which is not for the dedicated bowlsets | ||
|- | |- | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Dirty bowlset | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Spin coating of | Spin coating of other substances in dirty bowlset | ||
<br> | <br> | ||
Latest revision as of 09:18, 11 December 2025
Spin coater: Labspin
|
|
| Spin Coater: Labspin 02 | Spin Coater: Labspin 03 + fumehood 11 |
| Loacted in wetbench 08 in E-5 | Located in wetbench 09 in E-5 |
| LabSpin 6, Süss MicroTec | LabSpin 6, Süss MicroTec |
Training video: LabSpin02 + 03
Process information
Spin curves (LabSpin 6):
More information on resists (incl. spin curves) is available in the resist overview.
Available bowlsets:
| Bowlset name | Component solvent | Cleaning solvent | List of resists | Comments |
|---|---|---|---|---|
| AZ resist | PGMEA/Ethyl Lactate | Acetone |
AZ 5214E |
Two bowlsets available |
| CSAR/ZEP/mrEBL/PMMA | Anisole | Remover 1165 |
AR-P 6200 series (CSAR 62) |
|
| HSQ/AR-N 8200 | MIBK/PGME/n-Butyl acetate | Acetone |
HSQ (FOx series) |
|
| OrmoComp/OrmoStamp | Propyl Acetate | Acetone |
OrmoComp |
|
| BCB/CYCLOTENE | Mesitylene | T1100 |
3022-X |
|
| Epoxy/Acrylate | Cyclopentanone/PGMEA/PGME/GBL | Acetone |
SU-8 3000 series |
|
| AR-P 617/AR-N 7520 New | PGME/PGMEA | Acetone | AR-N 7500 series | |
| Polymer Ps-b-PDMS/block copolymer | Heptane | Ethyl Acetate | ||
| DIRTY bowlset | Anything Organic | Use the appropriate cleaning reagent for your resist |
| Purpose | Labspin |
Spin coating of resist ONLY in dedicated bowlsets Please do NOT use substances which is not for the dedicated bowlsets |
|---|---|---|
| Dirty bowlset |
Spin coating of other substances in dirty bowlset
| |
| Process parameters | Spin speed |
|
| Spin acceleration |
| |
| Substrates | Substrate size |
|
| Allowed materials |
All cleanroom materials Please ONLY use substances which is for the dedicated bowlsets in labspins | |
| Batch |
1 |