Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch with ICP Metal: Difference between revisions
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! Parameter | ! Parameter | ||
|Recipe name: ''' | |Recipe name: '''Al2O3 Etch''' | ||
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|Coil Power [W] | |Coil Power [W] | ||
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==Al2O3 etching by sanvis@nanolab== | ==Al2O3 etching by Sanjeev Vishal Kota sanvis@nanolab== | ||
*[[Media:Alumina etch information.pptx|Presentation made by Sanvis @DTU Nanolab, click to view]] | *[[Media:Alumina etch information.pptx|Presentation made by Sanvis @DTU Nanolab, click to view]] | ||