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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/SiO2 etch: Difference between revisions

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{| class="wikitable"
<gallery caption="Etch rate uniformity" widths="400px" heights="2000px" perrow="3">
|+ Etch uniformity
File:Peg3 SiO2 uniformity Y34 to Y40.jpg
|-
File:Peg3 SiO2 uniformity normalized Y34 to Y40.jpg
! SiO2 etch rate uniformity !! SiO2 etch rate uniformity normalized to center!! Si Etch rate uniformity
File:Peg3 Si etch uniformity Y38 and Y40.jpg
|-
</gallery>
| [[File:Peg3 SiO2 uniformity Y34 to Y40.jpg]] || [[File:Peg3 SiO2 uniformity normalized Y34 to Y40.jpg]] || valign="top"| [[File:Peg3 Si etch uniformity Y38 and Y40.jpg]]
|}
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