Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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=Scanning Electron Microscopy at Nanolab= | =Scanning Electron Microscopy at Nanolab= | ||
There is a large range of scanning electron microscopes (SEMs) at DTU Nanolab. The first couple of sections on this page are about the SEMs in and around the fabrication part of Nanolab in building 346 and 451. The last section is about the SEMs in building 314, which is our dedicated characterization facility. | There is a large range of scanning electron microscopes (SEMs) at DTU Nanolab. The first couple of sections on this page are about the SEMs in and around the fabrication part of Nanolab in building 346 and 451. The last section is about the SEMs in building 314, which is our dedicated characterization facility. | ||
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==Comparison of the SEMs at DTU Nanolab - building 307/314 | ==Comparison of the SEMs at DTU Nanolab - building 307/314 == | ||
Due to ongoing development of tools and processes, some information regarding available SEMs may be incomplete or not quite up-to-date. | |||
{{SEM comparison table 314}} | {{SEM comparison table 314}} | ||