Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
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The request form [[:File:JEOL9500 request form.docx |can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk]. | The request form [[:File:JEOL9500 request form.docx |can be found here.]] Please send the request to [mailto:e-beam@nanolab.dtu.dk E-beam@nanolab.dtu.dk]. | ||
<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">''' | |||
<div class="left" style="color:red; width:auto; margin-left:auto; margin-right:auto;">'''Job requests are only handled during business hours. In order for us to verify the job and plan ahead, next day jobs must be submitted before 13.00.'''</div> | |||
==Request form guide== | ==Request form guide== | ||
Requests are made per cassette. Hence if you need more than one cassette you will need to submit more than one request form and more than one set of job files. | Requests are made per cassette. Hence if you need more than one cassette you will need to submit more than one request form and more than one set of job files. Please fill in the form as explained below. | ||
'''Date:''' | '''Date:''' Date of the request [YYMMDD]. | ||
'''Username:''' | '''Username:''' Labmanager username. | ||
'''Date and time:''' | '''Date and time:''' Suggest one or two vacant slots in the booking calendar. Make sure you can actually have the substrate ready on time. | ||
'''Cassette and window:''' Select the window(s) you would like to use | '''Cassette and window:''' Select the slot window(s) you would like to use. | ||
'''Job files:''' Job files must either be placed on: | '''Job files:''' Job files must either be placed on: | ||
*The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [ | *The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [YYMMDD-initials] with the date being the same as put on the request form | ||
*The JEOL 9500 system at /home/eb0/jeoleb/job/1preex | *The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username | ||
*The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles | *The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles | ||
Indicate on the form where we can find the files. | Indicate on the form where we can find the files. | ||
'''SDF filename(s):''' | '''SDF filename(s):'''Name of the SDF file(s). | ||
'''Prealignment:''' Please indicate if you need prealignment. | '''Prealignment:''' Please indicate if you need prealignment. | ||
'''Estimated execution time:''' | '''Estimated execution time:''' Expected execution time. Either from job compilation or based on the [[:File:Writing Time Estimator.xlsx|Writing Time Estimator Excel sheet]]. | ||
==Usage conditions== | ==Usage conditions== | ||