Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer: Difference between revisions
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To connect to the JCC simply start the PuTTY terminal found on the desktop. Choose the '''JEOL Compilation Computer''' in the Saved Sessions and click '''Open'''. The terminal will now connect and prompt for a password. The password is "Jeoleb", remember the capital J. The interface behaves alsmost identical to the JEOL 9500 computer, hence all the usual commands can be used, such as: | To connect to the JCC simply start the PuTTY terminal found on the desktop. Choose the '''JEOL Compilation Computer''' in the Saved Sessions and click '''Open'''. The terminal will now connect and prompt for a password. The password is "Jeoleb", remember the capital J. The interface behaves alsmost identical to the JEOL 9500 computer, hence all the usual commands can be used, such as: | ||
*Change directory in the terminal with the ''' | *Change directory in the terminal with the '''cd''' command. Use '''cd job/1PreExposureFiles''' to go to the pre exposure files working directory | ||
*Compile with the usual '''schd -exptime sdfname''' command | *Compile with the usual '''schd -exptime sdfname''' command | ||
*Use '''ebxmenu''' to open the EBX Menu, launch the '''Analysis''' program to find '''ACHK''' | *Use '''ebxmenu''' to open the EBX Menu, launch the '''Analysis''' program to find '''ACHK''' | ||
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The JCC has two important differences from the JEOL 9500 exposure system: | The JCC has two important differences from the JEOL 9500 exposure system: | ||
#Not all condition files found on the control computer will be present on the JCC. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when | #Not all condition files found on the control computer will be present on the JCC, in general we suggest you use "2na_ap4". To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transferring the files to the JEOL 9500 system. | ||
#The minimum shot time on the JCC is 10 ns, while it i 5 ns on the system itself. Thus for pre compilation on the JCC you must use a shot pitch high enough to satisfy that condition. The shot pitch does not affect the writing time estimate. | #The minimum shot time on the JCC is 10 ns, while it i 5 ns on the system itself. Thus for pre compilation on the JCC you must use a shot pitch high enough to satisfy that condition. The shot pitch does not affect the writing time estimate. | ||
#The JCC does not know the auto stocker, hence your SDF sequences must all ask for exposure on cassette #1, which is the default for a system without the auto stocker option. | |||
==Troubleshooting== | ==Troubleshooting== | ||
#If the console returns a "Can't open display" error when attempting to launch the EBX Menu, please restart the computer. | #If the console returns a "Can't open display" error when attempting to launch the EBX Menu, please restart the computer. | ||
#Any other issues, please notify [mailto:thope@dtu.dk Thomas Pedersen]. | #Any other issues, please notify [mailto:thope@dtu.dk Thomas Pedersen]. | ||